フレックスボウル product photo Primary L

フレックスボウル

The FlexBowl filter housing has been specifically designed for the challenging ultrapure chemical applications used in semiconductor manufacture. It meets Pall’s same high standards for cleanliness, purity, compatibility, and mechanical strength as its MegaplastTM housings. The housing’s extremely flexible design allows for easier and safer filter handling, and reduces cost of ownership.

The key to the flexibility of the FlexBowl filter housing design is a universal manifold, which can accommodate a reusable housing. This design connects easily to the manifold with a quarter turn of the locking ring.

Housings are available in 4 in (102 mm), 10 in (254 mm), and 20 in (508 mm) sizes. The 10 in (254 mm) housing is designed to fit standard 10 in (254 mm) filter cartridges with a diameter of up to 3.25 in (82.5 mm) and a nominal length of 10 in (254 mm). Standard semiconductor industry inlet and outlet connection fittings for this system are also offered in a variety of different sizes and styles.

Features & Benefits
  • Filter cartridge can be securely sealed in the bowl before approaching the tool.
  • Housing accepts standard length cartridges without the need for special adapters that add cost and may impede fluid flow and cleaning.
  • Assembled housing and cartridge unit is inserted into the manifold and securely sealed with a quarter turn of the manifold locking ring using a spanner wrench.1 It can be disengaged from the manifold quickly with a quarter turn of the locking ring.
  • Cartridge and bowl are removed as a unit, requiring minimal space in the tool.
  • Cartridge, still sealed within the housing, can be safely transported to an appropriate area for changeout, with minimal exposure to chemicals at the tool.

1 Part number ACS0655AA



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カタログ・技術資料

Datasheets

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概要

The FlexBowl filter housing has been specifically designed for the challenging ultrapure chemical applications used in semiconductor manufacture. It meets Pall’s same high standards for cleanliness, purity, compatibility, and mechanical strength as its MegaplastTM housings. The housing’s extremely flexible design allows for easier and safer filter handling, and reduces cost of ownership.

The key to the flexibility of the FlexBowl filter housing design is a universal manifold, which can accommodate a reusable housing. This design connects easily to the manifold with a quarter turn of the locking ring.

Housings are available in 4 in (102 mm), 10 in (254 mm), and 20 in (508 mm) sizes. The 10 in (254 mm) housing is designed to fit standard 10 in (254 mm) filter cartridges with a diameter of up to 3.25 in (82.5 mm) and a nominal length of 10 in (254 mm). Standard semiconductor industry inlet and outlet connection fittings for this system are also offered in a variety of different sizes and styles.

Features & Benefits
  • Filter cartridge can be securely sealed in the bowl before approaching the tool.
  • Housing accepts standard length cartridges without the need for special adapters that add cost and may impede fluid flow and cleaning.
  • Assembled housing and cartridge unit is inserted into the manifold and securely sealed with a quarter turn of the manifold locking ring using a spanner wrench.1 It can be disengaged from the manifold quickly with a quarter turn of the locking ring.
  • Cartridge and bowl are removed as a unit, requiring minimal space in the tool.
  • Cartridge, still sealed within the housing, can be safely transported to an appropriate area for changeout, with minimal exposure to chemicals at the tool.

1 Part number ACS0655AA

仕様

Materials

Manifolds

  • Manifold: PFA
  • Locking Ring: Polyetherimide (PEI)

Bowl

  • Bowl: PFA
  • Ring Nut: PVDF
  • O-ring:
    H1 : FEP-encapsulated fluoroelastomer
    H11F : Kalrez2

Housing Head

  • Housing Head: PFA
  • O-ring: Kalrez2

Connections

  • Inlet/Outlet: 1", 3/4"
  • Vent/Drain: 1/2", 1/4"

Maximum Operating Temperature: 95 °C (203 °F)

Maximum Operating Pressure:
0.56 MPa (80 psid) @ 30 °C (86 °F)
0.28 MPa (40 psid) @ 95 °C (200 °F)

2 Kalrez is a registered trademark of DuPont Performance Elastomers.


Dimensions




性能

Typical Flow Characteristics – 1 cP fluid, 20 ºC Dimensions

製品カテゴリー

フィルター ハウジング

型式

Part Number Description Connections
Inlet, Outlet / Vent, Drain
Nominal Length (L) (mm/in.)
Complete Housing System
FBMH04T17E71H1 4 in. complete housing system 1 in. Pillar / 12 in. Pillar 396.14 / 15.60
FBMH04T13E71H1 4 in. complete housing system 34 in. Pillar / 12 in. Pillar 396.14 / 15.60
FBMH04T17E51H1 4 in. complete housing system 1 in. flare style / 12 in. flare style 351.04 / 13.82
FBMH04T13E51H1 4 in. complete housing system 34 in. flare style / 12 in. flare style 351.04 / 13.82
FBMH04T16EBWH1 4 in. complete housing system 1 in. butt weld / 12 in. butt weld 335.69 / 13.22
FBMH04T174E51H13 4 in. complete housing system 1 in. flare style / 14 in. flare style 346.96 / 13.66
FBMH04T134E51H13 4 in. complete housing system 34 in. flare style / 14 in. flare style 346.96 / 13.66
FBMH1T17E71H1 10 in. complete housing system 1 in. Pillar / 12 in. Pillar 528.64 / 20.81
FBMH1T13E71H1 10 in. complete housing system 34 in. Pillar / 12 in. Pillar 528.64 / 20.81
FBMH1T17E51H1 10 in. complete housing system 1 in. flare style / 12 in. flare style 483.54 / 19.04
FBMH1T13E51H1 10 in. complete housing system 34 in. flare style / 12 in. flare style 483.54 / 19.04
FBMH1T16EBWH1 10 in. complete housing system 1 in. butt weld / 12 in. butt weld 468.19 / 18.43
FBMH1T174E51H13 10 in. complete housing system 1 in. flare style / 14 in. flare style 479.54 / 18.88
FBMH1T134E51H13 10 in. complete housing system 34 in. flare style / 14 in. flare style 479.54 / 18.88
FBMH2T17E71H1 20 in. complete housing system 1 in. Pillar / 12 in. Pillar 784.14 / 30.87
FBMH2T13E71H1 20 in. complete housing system 34 in. Pillar / 12 in. Pillar 784.14 / 30.87
FBMH2T17E51H1 20 in. complete housing system 1 in. flare style / 12 in. flare style 744.54 / 29.31
FBMH2T13E51H1 20 in. complete housing system 34 in. flare style / 12 in. flare style 744.54 / 29.31
FBMH2T16EBWH1 20 in. complete housing system 1 in. butt weld / 12 in. butt weld 723.69 / 28.49
Manifold Only
FBMT17E71 Manifold only 1 in. Pillar / 1⁄2 in. Pilla 144.01 / 5.67
FBMT13E71 Manifold only 3⁄4 in. Pillar / 1⁄2 in. Pillar 144.01 / 5.67
FBM17E51 Manifold only 1 in. flare style / 1⁄2 in. flare style 136.14 / 5.36
FBM13E51 Manifold only 3⁄4 in. flare style / 1⁄2 in. flare style 136.14 / 5.36
FBM16EBW Manifold only 1 in. butt weld / 1⁄2 in. butt weld 129.79 / 5.1 1
Housing Kit
FBHT04EBWH1 4 in. G2 bowl n/a / 12 in. butt weld
FBHT044E51H1 4 in. G2 bowl n/a / 14 in. flare style
FBHT04E51H1 4 in. G2 bowl n/a / 12 in. flare style
FBHT04E71H1 4 in. G2 bowl n/a / 12 in. Pillar
FBHT1EBWH1 10 in. G2 bowl n/a / 12 in. butt weld
FBHT14E51H1 10 in. G2 bowl n/a / 14 in. flare style
FBHT1E51H1 10 in. G2 bowl n/a / 12 in. flare style
FBHT1E71H1 10 in. G2 bowl n/a / 12 in. Pillar
FBHT2EBWH1 20 in. G2 bowl n/a / 12 in. butt weld
FBHT2E51H1 20 in. G2 bowl n/a / 12 in. flare style
FBHT2E71H1 20 in. G2 bowl n/a / 12 in. Pillar

3 The manifold vent and drain connections are 1⁄2 in. flare style. The housing bowl vent is 1⁄4 in. flare style.

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