カタログ・技術資料
Datasheets
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The UltiKleen Excellar ER filters show enhanced retention (ER) and improved non-dewetting properties over previous designs. These properties enable semiconductor makers to meet the chemical process filtration requirements of the 22 nanometer manufacturing node and beyond. The result is a robust, reliable, and chemically clean filter suitable for use in aggressive cleaning chemistries such as SPM, SC-1 and SC-2. The JKC (Junior Kleen-Change®) assembly is a completely disposable filter unit and is designed for critical singlepass, point-of-use retention.
Features
- Enhanced retention (ER) of particles
- Robust non-dewetting PTFE medium
- High flow rates
- Hyperfine porous media matrix design
- All ultra high purity fluoro-polymer construction
- 100% integrity tested
仕様
Materials of construction
| Components | Materials |
| Filter Medium | Surface modified PTFE |
| Media Support | PFA |
| Core / Outer Cage | PFA |
| End Caps | PFA |
| Housing | PFA |
Removal Ratings and Operating Conditions
| Removal Ratings | 20 nm, 15 nm |
| Configurations | In-line |
| Nominal Filter Area | 1300 cm2 / 1.4 ft2 |
| Maximum Operating Temperature | 120 °C / 248 °F |
| Maximum Operating Pressure | 0.50 MPaG < 25 °C / 73 psig < 77 °F 0.20 MPaG < 90 °C / 28 psig < 194 °F 0.15 MPaG < 120 °C / 21 psig < 248 °F |
Dimensions2
2Nominal length
性能
Pressure Drop vs. Liquid flow Rate1 (Water, 20℃)
1 Typical flowrates. For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.
Unit conversion: 1 bar = 100 kPa
製品カテゴリー
型式
LDFN 03 [1] [2] E [3] [4]
Table 1
| Code | Removal Ratings |
| GP15 | 15 nm |
| GPK | 20 nm |
Table 2
| Code | Inlet /Outlet | Vent / Drain |
| 062 | ⅜ in male | ¼ in male |
| 7 | ⅜ in female | ¼ in female |
| 082 | ½ in male | ¼ in male |
Table 3
| Code | Connections |
| 0 | Non-connection |
| 1 | 20 series (Flowell) |
| 2 | Super Pillar Type (Nippon Pillar) 3 |
| 51 | Flare style |
| 71 | Super Pillar 300 P series (Nippon Pillar) |
| 72 | Super Pillar 300 P series L type (Nippon Pillar) |
Table 4
| Code | Prewet Option |
| K3 | Prewet filter (packaged in DI water) |
| K7 | Prewet filter (packaged in DI water), Low metal extractables 4 |
2 06 and 08 are available for Flare style connection.
3 Pillar is a trademark of Nippon Pillar Packing Co.
4 Please contact Pall on the extractable conditions.
5 Part numbers in conbination with all codes are not always availbale.
Please contact Pall for the part number availability.
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