ミニ・クリーンチェンジ (リソグラフィ用) product photo Primary L

ミニ・クリーンチェンジ (リソグラフィ用)

The Mini Kleen-Change filter assembly is designed for small scale dispense applications where low hold-up volume and cleanliness are critical. The low hold-up volume is ensured by the very small footprint. Cleanliness and compatibility are ensured by the all fluoro-polymer construction.

20nm grade has newly added to this product line that allows to remove more finer particles for the leading-edge industries.

  • Low hold-up volume
  • All fluoro-polymer construction
  • No elastomeric seals
  • Cleanroom manufactured


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カタログ・技術資料

Datasheets

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概要

The Mini Kleen-Change filter assembly is designed for small scale dispense applications where low hold-up volume and cleanliness are critical. The low hold-up volume is ensured by the very small footprint. Cleanliness and compatibility are ensured by the all fluoro-polymer construction.

20nm grade has newly added to this product line that allows to remove more finer particles for the leading-edge industries.

  • Low hold-up volume
  • All fluoro-polymer construction
  • No elastomeric seals
  • Cleanroom manufactured

仕様

Materials of Construction

 
Components Materials
Filter Media PTFE
Support and Drainage FEP / PTFE
Core, Cage, and End Caps PFA
Housing PFA
 


 
Removal Ratings 20 nm, 0.05 µm, 0.1 µm
Filter Area 320 cm2 / 50 in2
Connections Inlet / Outlet : ¼” Super Pillar Fitting *
Vent / Drain : ¼” Super Pillar Fitting *
Maximum Operating Temperature 248 °F / 120 °C
Maximum Operating Pressure 58 psi @ 77 °F / 0.4 MPa @ 25 °C
29 psi @ 194 °F / 0.2 MPa @ 90 °C
22 psi @ 248 °F / 0.15 MPa @ 120 °C
 
* Super Pillar is a trademark of Pillar Packing Co., Ltd.

性能

Pressure Drop vs. Liquid Flow Rate (Water, 20°C)1

Pressure Drop vs. Liquid Flow Rate
1For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa•s.

製品カテゴリー

アセンブリー, カプセル

参考情報

Dimensions

Dimensions

型式

Part Numbers / Ordering Information

 
Code Removal ratings Length L (in / mm)
FK 20 nm 4.25 / 108
F0005 0.05 µm
F001 0.1 µm
 

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