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ガスケットサートＰＳＰ　1 1/8 Wシール　 product photo Primary L

ガスケットサートＰＳＰ　1 1/8 Wシール　

The Gasket-Sert PSP W-seal filter is designed to protect major components of gas panels in semiconductor gas
distribution systems. The W-seal gasket is easy to install into any system that uses W-seal-type components.

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)

Feature Benefit Value
Welded to W-seal gasket Filter can replace any W-seal gasket Lower installation
cost
Contains alignment retainer Easy installation into system with
minimal operator handling		 Lower labor cost
All stainless steel
construction		 Broad compatibility with semiconductor
process gases		 Long service life
No housing required No hold-up volume and zero gas
displacement		 Faster start-up time
Cleanroom packaged High level of cleanliness Faster start-up time
0.4 μm particle removal
rating		 Filter protects critical components such
as regulators and MFCs		 Lower cost of
ownership
Low differential pressure High flow rates with minimal flow
restriction		 Long service life

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カタログ・技術資料

Datasheets

ダウンロード: 英語

概要

The Gasket-Sert PSP W-seal filter is designed to protect major components of gas panels in semiconductor gas
distribution systems. The W-seal gasket is easy to install into any system that uses W-seal-type components.

For detailed information about this product, please refer to the data sheet. (To download this data sheet, select Download PDF from the menu above.)

Feature Benefit Value
Welded to W-seal gasket Filter can replace any W-seal gasket Lower installation
cost
Contains alignment retainer Easy installation into system with
minimal operator handling		 Lower labor cost
All stainless steel
construction		 Broad compatibility with semiconductor
process gases		 Long service life
No housing required No hold-up volume and zero gas
displacement		 Faster start-up time
Cleanroom packaged High level of cleanliness Faster start-up time
0.4 μm particle removal
rating		 Filter protects critical components such
as regulators and MFCs		 Lower cost of
ownership
Low differential pressure High flow rates with minimal flow
restriction		 Long service life

仕様

Wetted Materials

  • Medium: 316L stainless steel (filter and gasket)

Removal Rating1

  • ≥ 0.4 μm at 99.9% efficiency

Operating Conditions

  • Maximum operating temperature Inert gases: 300 ˚C / 572 ˚F Anhydrous corrosive gases: 30 ˚C / 86 ˚F
  • Maximum differential pressure Inside out: 0.7 MPa at 38 ˚C / 100 psid at 100 ˚F Outside in: 1.4 MPa at 38 ˚C / 200 psid at 100 ˚F
1 Particle rating is based on laboratory testing with NaCl aerosol.

性能

Pressure Drop vs. Gas Flow Rate

W-seal Gasket-Sert PSP Filter

製品カテゴリー

カートリッジ／エレメント

参考情報

Dimensions

Dimensions

型式

Part Number Wetted Materials of Construction Fitting Type
CNF1104UPSG2 All 316L stainless steel 11⁄8 in. W-seal gasket

Unit conversion: 100 kilopascals = 1 bar

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