ガスクリーンTM トップマウントシリーズ ( 1 1/8 Cシール) product photo Primary L

ガスクリーンTM トップマウントシリーズ ( 1 1/8 Cシール)

Pall's Gaskleen® Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is ideally suited for integrated gas delivery systems, providing easy access and changeout.

  • 316L stainless steel housing
  • State-of-the-art filter medium
  • High temperature and pressure capabilities.
  • Excellent gas displacement and desorption characteristics
  • 100 % helium leak tested
  • Manufactured and packaged in a cleanroom environment


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カタログ・技術資料

Datasheets

ダウンロード: 英語

概要

Pall's Gaskleen® Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is ideally suited for integrated gas delivery systems, providing easy access and changeout.

  • 316L stainless steel housing
  • State-of-the-art filter medium
  • High temperature and pressure capabilities.
  • Excellent gas displacement and desorption characteristics
  • 100 % helium leak tested
  • Manufactured and packaged in a cleanroom environment

仕様

Materials of Construction

Filter Medium GTMF1013CC4 : 316L stainless steel
GTMF3700CC4 : 316L stainless steel
GTMN1013CC4 : Nickel
GTMP3101CC4 : PTFE
Internal Surface Finish ≤ 0.13 μm / 5 μin Ra
Housing 316L stainless steel
Housing material meets or exceeds VIM/VAR specifications.
EU pressure equipment directive: Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.
Internal housing surface chmistry Cr:Fe (1:1) chromium-enriched
Core and end caps
(GTMP3101CC4)
PFA
O-ring
(GTMP3101CC4)
FEP encapsulated fluorocarbon
Removal Rating ≥ 3 nm
Particle Removal Characteristics GTMF1013CC4 : 109 particle reduction up to 5 slpm
GTMN1013CC4 : 109 particle reduction up to 3 slpm
GTMP3101CC4 : 109 particle reduction up to 75 slpm
GTMF3700CC4 : 109 particle reduction up to 100 slpm
Connections C-seal, 1 1/8" interface
Leak Rating 100% helium leak tested to 10-9 atm cm3 / sec
Design validated to 10-11 atm cm3 / sec
Design Pressure
(Maximum Operating Pressure)
3.5 MPa @ 100 ºC / 500 psig @ 212 ºF
Maximum Allowable Differential Pressure GTMF1013CC4 / GTMN1013CC4 / GTMF3700CC4
0.7 MPa @ 38 ºC / 100 psid @ 100 ºF
GTMP3101CC4
0.6 MPa @ 121 ºC / 80 psid @ 250 ºF

性能

Air Flow vs. Pressure Drop

GTMF1013CC4

GTMF1013CC4

GTMN1013CC4

GTMN1013CC4

GTMP3101CC4

GTMP3101CC4

GTMF3700CC4

GTMP3101CC4

製品カテゴリー

アセンブリー

参考情報

Dimensions

P3101 N3600

型式

Part Number Description Height
(mm / in.)
Shell Diameter
(mm / in.)
Design Flow
Rate (slpm)
GTMF1013CC4 All 316 L stainless steel 35.6 / 1.4 22.1 / 0.87 0 – 5
GTMN1013CC4 316 L stainless steel housing Nickel filter 35.6 / 1.4 22.1 / 0.87 0 – 3
GTMP3101CC4 316 L stainless steel housing All fluoro-polymer element 74.5 / 2.93 21.7 / 0.85 0 – 75
GTMF3700CC4 All 316 L stainless steel 74.5 / 2.93 21.7 / 0.85 0 - 100

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