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  5. ガスクリーンＴＭ トップマウントシリーズ （ 1 1/8 Wシール）
ガスクリーンＴＭ トップマウントシリーズ （ 1 1/8 Wシール） product photo Primary L

ガスクリーンＴＭ トップマウントシリーズ （ 1 1/8 Wシール）

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.

  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel or nickel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
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カタログ・技術資料

Datasheets

ダウンロード: 英語

概要

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.

  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel or nickel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment

仕様

Materials of Construction

Filter Medium GTMF1013F4A: 316L stainless steel
GTMN1013F4A: Nickel
GTMF3700F4A: 316L stainless steel
Internal Surface Finish ≤ 5 μin / 0.13 μm Ra
Housing Electropolished 316L stainless steel Housing material meets or exceeds VIM/VAR specifications.
Internal housing surface chemistry Cr:Fe (1:1) chromium-enriched
Removal Rating ≥ 3 nm
Particle Removal Characteristics GTMF1013F4A: 109 particle reduction up to 5 slpm
GTMN1013F4A: 109 particle reduction up to 3 slpm
GTMF3700F4A: 109 particle reduction up to 100 slpm
Connections W-seal, 1 1/8" interface
Leak Rating 100% helium leak tested to 10-9 atm cm3 / sec Design validated to 10-11 atm cm3 / sec
Maximum Operating Pressure 3.4 MPa @ 100 ºC / 500 psig @ 212 ºF
Maximum Allowable Differential Pressure 0.69 MPa @ 40 ºC / 100 psid @ 104 ºF
EU pressure equipment directive Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.

性能

Pressure Drop vs. Gas Flow Rate

F1013

F1013

F3700

F3700

製品カテゴリー

アセンブリー

参考情報

Dimensions

F1013

F1013

型式

Part Number Description Height
(mm / in.)		 Design Flow
Rate (slpm)
GTMF1013F4A All 316L stainless steel 36.8 / 1.45 0 - 5
GTMN1013F4A 316L stainless steel housing Nickel filter 40.2 / 1.45 0 - 3
GTMF3700F4A 316L stainless steel 79.3 / 3.12 0 - 100

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