ガスクリーンⅣ product photo Primary L

ガスクリーンⅣ

The Gaskleen® IV Series Filter Assembly is specifically designed for ≤ 3 nanometers (0.003 µm) filtration of ultra-high purity semiconductor process gases. This assembly provides additional features over those normally associated with all fluoro-polymer element point-ofuse process gas filters. These include:
  • No downstream (wetted surface) weld
  • No elastomeric seals
  • Rotatable VCR1 nuts for ease of installation
  • Excellent gas displacement characteristics (low internal volume)

Additional characteristics

  • High purity 316L stainless steel electropolished housing
  • All fluoro-polymer element
  • High temperature and pressure capabilities
  • Compact size (1.13 in./ 28.8 mm dia.) for ease of installation
  • 100% integrity tested
  • Cleanroom manufactured and packaged
1 VCR is a trademark of Swagelok Co.

Products in this datasheet may be covered by one or more patents, including US 5,510,026.


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Datasheets

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概要

The Gaskleen® IV Series Filter Assembly is specifically designed for ≤ 3 nanometers (0.003 µm) filtration of ultra-high purity semiconductor process gases. This assembly provides additional features over those normally associated with all fluoro-polymer element point-ofuse process gas filters. These include:
  • No downstream (wetted surface) weld
  • No elastomeric seals
  • Rotatable VCR1 nuts for ease of installation
  • Excellent gas displacement characteristics (low internal volume)

Additional characteristics

  • High purity 316L stainless steel electropolished housing
  • All fluoro-polymer element
  • High temperature and pressure capabilities
  • Compact size (1.13 in./ 28.8 mm dia.) for ease of installation
  • 100% integrity tested
  • Cleanroom manufactured and packaged
1 VCR is a trademark of Swagelok Co.

Products in this datasheet may be covered by one or more patents, including US 5,510,026.

仕様

 
Filter Medium PTFE
Support TFE / FEP
Core and end caps PFA 440HP
O-ring none
internal surface finish ≤ 7 μin / 0.18 μm Ra
Housing Electropolished 316L stainless steel VAR PLUS housing meets or exceeds typical VIM / VAR specifications
Removal Rating2 ≥ 3 nm
Preconditioned Cleanliness < 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD)
< 10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD)
< 10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD)
< 1 particle/(ft3) contribution above background
Connections 1⁄4" Gasket seal, male (VCR or compatible)
1⁄4" Butt Weld (0.035" / 0.89 mm wall)
3⁄8" Gasket Seal, male (VCR or compatible)
3⁄8" Butt Weld (0.035" / 0.89 mm wall)
1⁄2" Butt Weld (0.049" / 1.24 mm wall)
Leak Rating 100% helium leak tested to 10-9 atm•cm3/s
Design validated to 10-11 atm•cm3/s
Maximum Operating Pressure 750 psig @ 284 °F / 52 bar @ 140 °C
Maximum Forward Differential Pressure 100 psid @ 100 °F / 7 bar @ 38 °C
Maximum Reverse Differential Pressure 50 psid @ 100 °F / 3.5 bar @ 38 °C
Packaging Double bagged
Outer bag: aluminized mylar3
Inner bag: polyethylene
N2 purged
 

1 VCR is a trademark of Swagelok Co.
2 Particle rating based on laboratory testing with NaCl aerosol.
3 Mylar is a registered trademark of Dupont Teijin Films.

性能

Pressure Drop vs. Gas Flow Rate1

Pressure Drop vs. Gas Flow Rate
1 For .25 in. connections

製品カテゴリー

アセンブリー

参考情報

Dimensions

VCR Connection

VCR Connection

Butt Weld Connection

Butt Weld Connection

型式

 
Part Number Description Length (L)
(in. / mm)
SGLFPF6402VMM4 14 in. Gasket Seal, (VCR or Compatible) Male Inlet/Male Outlet 5.00 /127
GLFPF6402BW4 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 3.87 / 98
SGLFPF6402VMM6/8 38 in. Gasket Seal, (VCR or Compatible) Male Inlet/Male Outlet 5.00 /127
GLFPF6402BW6 38 in. Butt Weld, 0.035 in. / 0.89 mm wall 3.87 / 98
GLFPF6402BW8 12 in. Butt Weld, 0.049 in. / 1.24 mm wall 3.87 / 98
 

Unit conversion: 1 bar = 100 kilopascals

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