カタログ・技術資料
Datasheets
ダウンロード:概要
The Ultramet-L® 6600 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
- All 316L stainless steel construction
- State-of-the-art 316L stainless steel media
- Preconditioned to ultraclean levels
- Accommodates extremely high flow rates for assembly size
- Excellent gas displacement and desorption characteristics
- High temperature and pressure capabilities
- 100% helium leak tested
- Cleanroom manufactured and packaged
- CE marked in accordance with PED 97/23/EC
仕様
Filter Medium | 316L stainless steel1 |
Internal Surface Finish | 6601: ≤ 10 μin / 0.25 μm Ra 6602: ≤ 0.7 μm Rmax |
Housing | Electropolished 316L stainless steel Housing material meets or exceeds VIM / VAR specifications |
Removal Rating | ≥ 3 nm |
Preconditioned Cleanliness | <10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD) |
<10 ppb THC contribution (Qualified per SEMASPEC test method #90120396B-STD) | |
<10 ppb O2 contribution (Qualified per SEMASPEC test method #90120398B-STD) | |
<1 particle/(ft3 or m3) particle contribution above background | |
Connections | 1⁄2" Gasket Seal, Male / Male (VCR2 or compatible) |
Leak Rating | 100% helium leak tested to 10-9 atm•cm3/s |
Design validated to 10-11 atm•cm3/s | |
Maximum Operating Pressure | 750 psig @ 100 °F/52 bar @ 38 °C 550 psig @ 800 °F/38 bar @ 426 °C for inert gases only |
Maximum Forward Differential Pressure | 30 psid @ 68 °F/2.1bar @ 20 °C 15 psid @ 800 °F/1 bar @ 426 °C inert gases only |
Particle Removal Characteristics | 109 particle reduction up to 320 slpm/ 11.3 scfm |
EU pressure equipment directive | Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU |
1 The 6600 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
2 VCR is a registered trademark of Swagelok Co.
性能
Pressure Drop vs. Gas Flow Rate
76 mm Ultramet-L Assemblies
![76 mm Ultramet-L Assemblies 76 mm Ultramet-L Assemblies](/INTERSHOP/static/WFS/PALL-PALLUS-Site/-/PALL/en_US/images/Microelectronics/ultramet-l_6600_chart1.jpg)
製品カテゴリー
アセンブリー
参考情報
Dimensions
![Dimensions Dimensions](/INTERSHOP/static/WFS/PALL-PALLUS-Site/-/PALL/en_US/images/Microelectronics/ultramet-l_6600_chart2.jpg)
型式
Part Number | Description | ||
GLFF6601VMM8 | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male, ≤ 10 μin / 0.25mm Ra |
6.06 / 154 | 3.02 / 76.7 |
GLFF6602VMM8 | 1⁄2 in. Gasket Seal (VCR or Compatible) Male/Male, ≤ 0.7 μm Rmax | 6.06 / 154 | 3.02 / 76.7 |
Unit conversion: 1 bar = 100 kilopascals
レビュー
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