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Datasheets
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The Ultramet-L® 4581 Series Filter Assemblies are available with an all 316L stainless steel housing and 316L stainless steel filter. They are designed for ≥ 1.5 nanometer (0.0015 μm) filtration of semiconductor grade gases. The 4581 series filters are recommended for all applications with process gases that are compatible with 316L stainless steel.
- State-of-the-art 316L stainless steel or nickel media
- Excellent particle removal efficiency vs. pressure drop
- Accommodates extremely high flow rates for the assembly size
- Excellent gas displacement and desorption characteristics
- High temperature and pressure capabilities
- Compact size for ease of installation
- Wide variety of fitting options available
- 100% helium leak tested
- Cleanroom manufactured and packaged
- Housing material meets or exceeds VIM VAR specifications.
仕様
| Filter Medium | 316L stainless steel or nickel |
| Internal Surface Finish | 10 μin / 0.25 μm Ra |
| Housing | Electropolished 316L stainless steel Housing material meets or exceeds typical VIM VAR specifications |
| Removal Rating | ≥ 1.5 nm |
| Particle Removal Characteristics | 109 particle reduction up to 50 slpm / 1.76 scfm |
| Connections | 1⁄4" Gasket Seal, male (VCR2 or compatible) |
| Leak Rating | 100% helium leak tested to 10-9 atm•cm3/sec |
| Design validated to 10-11 atm•cm3/sec | |
| Maximum Operating Pressure | 3,000 psig @ 100 °F / 207 bar @ 38 °C; 1,685 psig @ 840 °F / 116 bar @ 450 °C |
| Maximum Allowable Differential Pressure | 125 psid @ 100 °F / 8.6 bar @ 38 °C; 60 psid @ 840 °F / 4.1 bar @ 450 °C |
| EU pressure equipment directive | Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU |
2 VCR is a trademark of Swagelok Co.
性能
Pressure Drop vs. Gas Flow Rate
GLFF4581VMM4
製品カテゴリー
アセンブリー
参考情報
Dimensions
型式
| Part Number | Description | Fitting Type |
| GLFF4581VMM4 | All Stainless Steel | 1⁄4 in. Gasket Seal (VCR or Compatible) Male / Male |
Unit conversion: 1 kilogram per square centimeter = 98.067 kilopascals
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