カタログ・技術資料
Datasheets
ダウンロード:概要
The Gasket-SertTM PMF filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
- True in-line design and easy installation
- Fits in place of standard 1/4” and 3/8”,1/2” VCR1 ,UJR2 gasket & 1/4” and 3/8” UPG3 gasket
- Broad compatibility with process gases
- Low differential pressure
- Gasket material 316L stainless steel
- Dried with high purity nitrogen
- Cleanroom packaged
- No hold-up volume
- No particle contribution above background
- No housing required
- Retrofit of existing panels without reconfiguring of systems
- Zero displacement
- Protection for regulators and MFCs
1 VCR is a trademark of Swagelok Co.
2 UJR is a trademark of Fujikin Incorporated.
3 UPG is a trademark of Fujikin Incorporated.
UJR, VCR fitting type
UPG fitting type
Installation example : 1/4” VCR fitting
仕様
Materials
- Medium: 316L stainless steel
- Gasket: 316L stainless steel
Removal Rating
- ≥ 0.4 μm
Maximum Operating Temperature Non-Corrosive Gases
- 840 °F / 450 °C
Maximum Differential Pressure
- 60 psid @ 100 °F / 4.2 bar @ 38 °C
性能
Pressure Drop vs. Gas Flow Rate
製品カテゴリー
カートリッジ／エレメント
参考情報
Dimensions
型式
CNF1004 [TABLE 1]
| Code | Fitting type | Gasket material | Medium material | Length (L) (mm) | Length (A) (mm) |
| USG4 | 1⁄4" UJR, VCR | 316L stainless steel | 316L stainless steel | 26.1 | ∅4.2 |
| USG6 | 3⁄8" 1⁄2" UJR, VCR | 316L stainless steel | 316L stainless steel | 30.0 | ∅6.7 |
| UPSG4 | 1⁄4" UPG | 316L stainless steel | 316L stainless steel | 26.6 | ∅4.2 |
| UPSG6 | 3⁄8" UPG | 316L stainless steel | 316L stainless steel | 30.0 | ∅6.7 |
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