Datasheets
ダウンロード:The Ultramet-L® 4400 Series Filter Assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 1.5 nanometer filtration of semiconductor grade gases. The 4400 series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel. For applications with corrosive gases, such as halogen containing acid gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.
- State-of-the-art 316L stainless steel or nickel media
- Preconditioned to ultraclean levels
- Excellent particle removal efficiency vs. pressure drop
- Accommodates extremely high flow rates for the assembly size
- Excellent gas displacement and desorption characteristics
- High temperature and pressure capabilities
- Compact size for ease of installation
- Wide variety of fitting options available
- 100% helium leak tested
- Cleanroom manufactured and packaged
- Housing material meets or exceeds VIM VAR specifications.
| Filter Medium | 316L stainless steel |
| Internal Surface Finish | ≤ 0.18 mm / 7 μin Ra |
| Internal Surface Chemistry | Cr:Fe (1:1) Chromium enriched |
| Housing | Electropolished 316L stainless steel housing VAR PLUS housing material meets or exceeds typical VIM / VAR specifications |
| Removal Rating | ≥ 1.5 nm |
| Preconditioned Cleanliness* | < 10 ppb moisture contribution (Qualified per SEMSPEC test method #90120397B-STD) |
| < 10 ppb THC contribution (Qualified per SEMSPEC test method #90120396B-STD) | |
| < 10 ppb O2 contribution (Qualified per SEMSPEC test method #90120398B-STD) | |
| No particle contribution above background ≤ 1 particle / (ft3 or m3) | |
| Connections | 1⁄4", 1⁄2" Gasket Seal, Male / Male (VCR1 or compatible) |
| 1⁄4" Butt Weld (0.035˝ / 0.89 mm wall) | |
| Maximum Operating Pressure | 20.7 MPa at 38 °C / 3,000 psig at 100 °F 1 1.6 MPa at 450 °C / 1,685 psig at 840 °F |
| Maximum Allowable Differential Pressure | 316L Stainless Steel Filter: 0.9 MPa at 38 °C / 125 psid at 100 °F 0.4 MPa at 450 °C / 60 psid at 840 °F |
| Nickel Filter: 1.0 MPa at 38 °C / 150 psid at 68 °F 0.5 MPa at 426 °C / 75 psid at 800 °F |
|
| Particle Removal Characteristics | 109 particle reduction at 50 slpm / 1.76 scfm |
| Leak Rating | 100% helium leak tested to 10-9 atm•cm3/s |
| Design validated to 10-11 atm•cm3/s | |
| EU Pressure Equipment Directive | Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU |
* Gasket Seal only fittings.
1 VCR and Swagelok are trademarks of Swagelok Co.
Pressure Drop vs. Gas Flow Rate
Dimensions
| Part Number | Description | Fitting Type (in / mm) | Length (L) |
| GLFF4400VMM4 | All 316L Stainless Steel | 1⁄4" Gasket Seal (VCR or Compatible) Male/Male | 3.31 / 84 (L1) |
| GLFF4400BW4 | All 316L Stainless Steel | 1⁄4" Butt Weld, 0.035" / 0.89 mm wall | 1.75 / 45 (L2) |
| GLFN4400VMM4 | Nickel Media, 316L Stainless Steel Housing | 1⁄4" Gasket Seal (VCR or Compatible) Male / Male | 3.31 / 84 (L1) |
| GLFN4400VFM4 | Nickel Media, 316L Stainless Steel Housing | 1⁄4" Gasket Seal (VCR or Compatible) Female Inlet / Male Outlet | 2.80 / 71 (L1) |
| GLFN4400VMF4 | Nickel Media, 316L Stainless Steel Housing | 1⁄4" Gasket Seal (VCR or Compatible) Male Inlet / Female Outlet | 2.80 / 71 (L1) |
| GLFN4400VMM8 | Nickel Media, 316L Stainless Steel Housing | 1⁄2" Gasket Seal (VCR or Compatible) Male / Male | 3.31 / 84 (L1) |
| GLFN4400BW4 | Nickel Media, 316L Stainless Steel Housing | 1⁄4" Butt Weld, 0.035" / 0.89 mm wall | 1.75 / 44 (L2) |
Unit conversion: 1 bar = 100 kilopascals
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