カタログ・技術資料
Datasheets
ダウンロード:概要
The Pall Ultipleat SP DR filter is designed specifically for high flow and improved particle removal in critical surface preparation chemical baths such as HF and BOE. The SP DR filter features a highly asymmetrical membrane construction, developed using Pall's proprietary membrane modeling technology (MMT).
The pore size distribution of the membrane uniformly transitions from microporous to nanoporous throughout its depth. The result is a new, application-specific membrane morphology designed for deep submicron retention of particles down to 2 nanometers. This retention is achieved without the flow restriction limitations of conventional membrane pore structures.
The 2 , 5 and 10 nanometer Ultipleat SP DR filters utilize a native polyarylsulfone membrane with over 40% higher surface energy than typical surface modified nondewet PTFE membranes.
The Ultipleat SP DR SWD capsules are space-saving and low pressure drop disposable filter units. They are ideally suited for installing into single wafer cleaning systems.
The pore size distribution of the membrane uniformly transitions from microporous to nanoporous throughout its depth. The result is a new, application-specific membrane morphology designed for deep submicron retention of particles down to 2 nanometers. This retention is achieved without the flow restriction limitations of conventional membrane pore structures.
The 2 , 5 and 10 nanometer Ultipleat SP DR filters utilize a native polyarylsulfone membrane with over 40% higher surface energy than typical surface modified nondewet PTFE membranes.
The Ultipleat SP DR SWD capsules are space-saving and low pressure drop disposable filter units. They are ideally suited for installing into single wafer cleaning systems.
- MMT-enhanced dual retention of particles
- Superior HF filtration
- Higher flow rates and longer life
- Hyperfine microporous membrane matrix
- High surface energy membrane for minimized microbubble formation
- Faster tool qualification for reduced cost of ownership
- Compact space-saver small capsules
仕様
Materials of Construction
| Components | Materials |
| Filter Medium | Polyarylsulfone |
| Support and drainage | Polyethylene |
| Core,cage and end caps | Polyethylene |
| Sealing method | Melt seal |
| Housing | Polyethylene |
| O-ring options | FEP encapsulated fluoroelastomer |
| Product Name | Ultipleat SP DR KC Assemblies | Ultipleat SP DR SWD Capsules | |||
| Removal Ratings | 30 nm | 10 nm | 10 nm | 5 nm | 2 nm |
| Media Wettability | Hydrophilic | Hydrophobic | Hydrophobic | ||
| Configurations | Inline | Inline | U-flow | ||
| Filter Areas | 1.2 m2 / 12.9 ft2 | 0.8 m2 / 8.6 ft2 | 0.25 m2 / 2.7 ft2 | 0.20 m2 / 2.2 ft2 | |
| Maximum Operating Temperature | 50 °C / 122 °F | 60 °C / 140 °F | |||
| Maximum Operating Pressure | 0.39 MPaG / 57 psig ‹ 25 °C / 77 °F 0.15 MPaG / 21 psig ‹ 50 °C / 122 °F | 0.35 MPaG / 51 psig ‹ 38 °C / 100 °F 0.17 MPaG / 25 psig ‹ 60 °C / 140 °F | |||
| Maximum Forward Differential Pressure | 0.1 MPa / 15 psid @ 50 °C / 122 °F | 0.1 MPa / 15 psid @ 60 °C / 140 °F | |||
| Product Name | Ultipleat SP DR Filters | |||
| Removal Ratings | 30 nm | 10 nm | ||
| Media Wettability | Hydrophilic | Hydrophobic | ||
| Configurations | 254 mm / 10 in | 229 mm / 9 in | 254 mm / 10 in | 229 mm / 9 in |
| Filter Areas | 1.5 m2 / 16.1 ft2 | 1.3 m2 / 14.0 ft2 | 1.0 m2 / 10.8 ft2 | 0.98 m2 / 10.6 ft2 |
| Maximum Operating Temperature | 70 °C / 158 °F | |||
| Maxiimum Forward Differential Pressure | 0.1 MPa / 15 psid @ 70 °C / 158 °F | |||
Dimensions (Nominal)
性能
Pressure Drop vs. Liquid flow Rate1 (Water, 20℃)
1Typical flow rates. For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.
製品カテゴリー
アセンブリー, カプセル, カートリッジ／エレメント, POUフィルター
型式
Part Numbers / Ordering Information3
Ultipleat SP DR KC Assemblies
LDDN09 [Table 1] [Table 2] E51 [Table 3]
Table 1
| Code | Removal Ratings |
| HSVH | 10 nm |
| UHSQ | 30 nm |
Table 2
| Code | Inlet / Outlet | Vent / Drain | Flow |
| 12 | 3⁄4 in. male flare style | 1⁄2 in. male flare style | Inline |
| 164 | 1 in. male flare style | 1⁄4 in. male flare style | Inline |
Table 3
| Code | Prewet Option | Scope |
| None | Dry | 30 nm only |
| -K3 | Prewet filter (packaged in DI water) | 10 nm only |
| -K6 | Dry, Low metal extractables2 | 30 nm only |
| -K13C | Prewet filter (packaged in DI water), Low metal extractables2 | 10 nm only |
Ultipleat SP DR SWD Capsules
SWD03 [Table 1] 4E71 [Table 2]
Table 1
| Code | Removal Ratings |
| HSAH | 2 nm |
| HSSH | 5 nm |
| HSVH | 10 nm |
Connections (Inlet/Outlet, Vent: 1⁄4 in , Super Pillar4 300 P series (Nippon Pillar)
Table 2
| Code | Prewet Option | Scope |
| -K13C | Prewet filter ( packaged in DI water), Low metal extractables2 | 5 nm, 10 nm only |
| -K13D | Prewet filter ( packaged in DI water), Low metal extractables2 | 2 nm only |
Ultipleat SP DR Filters
ABD [1] [2] 3EH1 [3]
Table 1
| Code | Cartidge Length (Nominal) |
| 04 | 102 mm / 4 in. |
| 09 | 229 mm / 9 in. |
| 1 | 254 mm / 10 in. |
| 2 | 508 mm / 20 in. |
| 3 | 762 mm / 30 in. |
Table 2
| Code | Removal Ratings |
| HSVH | 10 nm |
| UHSQ | 30 nm |
Table 3
| Code | Prewet Option | Scope |
| None | Dry | 30 nm only |
| -K3 | Prewet filter (packaged in DI water) | 10 nm only |
| -K6 | Dry, Low metal extractables2 | 30 nm only |
| -K13C | Prewet filter (packaged in DI water), Low metal extractables2 | 10 nm only |
2 Please contact Pall for the extractable conditions.
3 Part numbers in combination with all codes are not always available.
Please contact Pall for the part number availability.
4 Pillar is a trademark of Nippon Pillar Packing Co.
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