
HFE Filter Housing
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Description
The HFE filter housings are designed to accommodate the Pall High-Flow Emflon® filter cartridges. Typical applications include bulk nitrogen (N2) and compressed dry air (CDA) used in the semiconductor, flat panel display and photovoltaic manufacturing processes.
- Holds 1 or 3 cartridges
- Available in 508 mm (20 in.) or 1,016 mm (40 in.) lengths
- Flow rates from 1,000 Nm3/h (588 scfm) to 20,000 Nm3/h (11,770 scfm) and above
- Bolted closure with clamp option
- Lifting davit standard with 3-around housings
- Connections are in-line "T" configuration
- Options to meet high or standard purity specifications
Specifications
Materials |
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Connections |
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Operating Conditions |
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Certifications |
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Leak Rating |
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* Housing with Emflon filters are not for use in oxygen service.
Type
Housings, Vessels, or Assemblies
Additional Information
Please contact Pall Microelectronics for detailed dimensions on specific housing part numbers.
Dimensions
1HFE | 3HFE | |
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Number of cartridges |
Filter length |
Nominal length (L) |
Nominal diameter (D) |
|
1HFE1 | 1 | 508 mm (20 in.) | 1218 mm (47.9 in.) | 553 mm (21.8 in.) |
1HFE2 | 1 | 1,016 mm (40 in.) | 1715 mm (67.5 in.) | 553 mm (21.8 in.) |
3HFE1 | 3 | 508 mm (20 in.) | 1913 mm (75.3 in.) | 889 mm (35.0 in.) |
3HFE2 | 3 | 1,016 mm (40 in.) | 2410 mm (94.9 in.) | 889 mm (35.0 in.) |
Please contact Pall Microelectronics for detailed dimensions on specific housing part numbers.
Ordering Information
[1] HFE [2] [3] - G [4] [5] [6] [7] [8] - [9] - [10]
Table 1
Code | Number of cartridges per housing |
1 | 1 |
3 | 3 |
Table 2
Code | Filter length |
2 | 508 mm (20 in.) |
4 | 1,016 mm (40 in.) |
Table 3
Code | Material |
4 | 304L SST |
6 | 316L SST |
Table 4
Code | Interior finish |
Blank | As received |
L | 0.25 μm (10 μin) Ra |
LL | 0.63 μm (25 μin) Ra |
Table 5
Code | Design pressure |
None | 1.7 MPa (250 psig) |
H | 2.5 MPa (363 psig) |
Table 6
Code | Connection size and style |
2T | 2 inch x 0.065 inch wall butt weld tube |
3T | 3 inch x 0.065 inch wall butt weld tube |
3F | 3 inch Sch 40 300# ANSI RFWN flange |
4T | 4 inch x 0.083 inch wall butt weld tube |
4F | 4 inch Sch 40 300# ANSI RFWN flange |
6P | 6 inch Sch 40 butt weld pipe |
6F | 6 inch Sch 40 300# ANSI RFWN flange |
8P | 8 inch Sch 40 butt weld pipe |
8F | 8 inch Sch 40 300# ANSI RFWN flange |
Table 7
Code | Description |
1 | CE marked |
2 | ASME Section VII Div I |
3 | CE and ASME |
Table 8
Code | Option |
Blank | Electropolished |
C9 | O2 Cleaned |
Table 9
Code | O-ring material |
H | FKM-1 |
H1 | PTFE Encapsulated FKM-1 |
Table 10
Code | Option |
Blank | Bolted closure |
C | Clamp style closure |
Application
Process gas filtration, Process gas filtration, CDA