Gaskleen® V Series Filter Assembly product photo Primary L

Gaskleen® V Series Filter Assembly

The Gaskleen V filter assembly is Pall’s latest generation gas filter assembly, designed to provide filtration of ultrahigh-purity semiconductor process gases. Our patented O-ring less design eliminates the need for an elastomeric seal. As a result, there are no downstream (wetted surface) welds.

The preconditioned option provides the cleanest PTFE filter assemblies available.
  • 316L stainless steel housing
  • All-fluoro-polymer filter element
  • High temperature and pressure resistance
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment.
Products in this datasheet may be covered by one or more patents, including US 5,510,026.


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Description
The Gaskleen V filter assembly is Pall’s latest generation gas filter assembly, designed to provide filtration of ultrahigh-purity semiconductor process gases. Our patented O-ring less design eliminates the need for an elastomeric seal. As a result, there are no downstream (wetted surface) welds.

The preconditioned option provides the cleanest PTFE filter assemblies available.
  • 316L stainless steel housing
  • All-fluoro-polymer filter element
  • High temperature and pressure resistance
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment.
Products in this datasheet may be covered by one or more patents, including US 5,510,026.
Specifications

Materials

  • Medium: PTFE
  • Support: fluoro-polymer
  • Core and end caps: PFA
  • O-ring: None
  • Electropolished 316L stainless steel housing
  • VAR PLUS housing meets or exceeds typical VIM / VAR specification
  • Internal Surface Finish
    • ≤ 0.18 μm / 7 μin Ra (gasket-seal fittings)
    • ≤ 0.51 μm / 20 μin Ra (compression fittings)
  • Cr:Fe (≥ 1.2:1) chromium enriched internal surface chemistry

Removal Rating1

  • ≥ 3 nm

Preconditioned Cleanliness Option

  • < 10 ppb moisture contribution
  • < 10 ppb total hydrocarbon (THC) contribution
  • < 10 ppb oxygen (O2) contribution

Connections

  • 14 in., 12 in. or 34 in. Gasket seal (VCR2 or compatible)
  • 14 in., 38 in. or 12 in. compression fittings

Operating Conditions

  • Maximum operating pressure: 5.2 MPa at 140 ˚C / 750 psig at 284 ˚F
  • Maximum allowable forward differential pressure: 0.7 MPa at 20 ˚C / 100 psid at 68 ˚F
  • Maximum allowable reverse differential pressure: 0.3 MPa at 20 ˚C / 50 psid at 68 ˚F
  • EU Pressure Equipment Directive: Assemblies have been evaluated for compliance with the European Union's Pressure Equipment Directive 2014/68/EU and are CE marked

Leak Rating

  • 100% helium leak tested to 10-9 atm•cm3/s
  • Design validated to 10-11 atm•cm3/s
1 Particle rating is based on laboratory testing with NaCl aerosol.
2 VCR is a trademark of Swagelok Company.
Performance

Pressure Drop vs. Gas Flow Rate

VMM4
Type
Assemblies
Use
Filtration
Additional Information

Dimensions

Dimensions
Unit conversion: 100 kilopascals = 1 bar
Ordering Information
 
Part Number3 Description Nominal Length
(L) (mm / inch)
Preconditioned
SGLFPF6501VMM4 14 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 No
SGLFPF6502VMM4 14 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 Yes
SGLFPF6501VMM8 12 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 No
SGLFPF6502VMM8 12 in. Gasket seal, (VCR or compatible) male / male 127 / 5.0 Yes
SGLFPF6501VMM12 34 in. Gasket seal, (VCR or compatible) male / male 140 / 5.5 No
GLFPF6501VMF4 14 in. Gasket seal, (VCR or compatible) male / female 141 / 5.6 No
SGLFPF6501SM4 14 in. Compression seal, (Swagelok4 or compatible) male / male 113 / 4.4 No
GLFPF6501SM4 14 in. Compression seal, (Swagelok or compatible) male / male 141 / 5.6 No
SGLFPF6501SM6 38 in. Compression seal, (Swagelok or ccompatible) male / male 118 / 4.6 No
GLFPF6501SM6 38 in. Compression seal, (Swagelok or compatible) male / male 148 / 5.8 No
SGLFPF6501SM8 12 in. Compression seal, (Swagelok or compatible) male / male 119 / 4.7 No
 
3 To order in box quantities of 24, please add “SB24” at the end of the part number. Example: SGLFPF6502VMM4SB24
4 Swagelok is a trademark of Swagelok Co.
Application
Process gas filtration, Process gas filtration, ガス ろ過 & 精製
Segment
Display
LED
Semiconductor