UltiKleen™ G3 and G2 HiT KC Assemblies product photo Primary L

UltiKleen™ G3 and G2 HiT KC Assemblies

The UltiKleen HiT KC Assembly is specially constructed with proprietary fluid flow path improvements, for reliable high particle removal efficiency in severe chemical service conditions, found in high temperature SPM applications.

Designed for critical single pass point-of-use retention requirements, the UltiKleen HiT KC Assembly provides a high flow rate that makes it suitable for recirculation bath applications as well.

The improved non-dewetting property help enable semiconductor makers to meet the critical chemical process filtration requirements beyond 32 nm manufacturing. Pall’s advanced ultra low extractables, Me-KleenSM K7 post treatment process is also available to reduce metal ion extractables to a low single digit ppb total.

The UltiKleen G3 KC T-flow assembly has a slightly larger diameter than the UltiKleen G2 KC T-flow assembly, but it has the same face-to-face sealing distance.1 This makes interchanging assemblies easy. The increased diameter of the G3 assembly contains a larger format UltiKleen Excellar ER filter with increased filter area and robust supports for higher flow rates and longer service life.
  • Enhanced retention of particles in high temperature
  • Greater than 95% retention of 15 nm gold colloids
  • Large nominal filter area of 2.6 m2/28 ft2
  • High flow rates
  • All ultra high purity fluoro-polymer construction
  • Low extractables (Me-Kleen K7 option is available)
  • 100% prewetted with ultrapure water in package
  • Downstream core vent reduces potential for bubble collection and premature blockage


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Description

The UltiKleen HiT KC Assembly is specially constructed with proprietary fluid flow path improvements, for reliable high particle removal efficiency in severe chemical service conditions, found in high temperature SPM applications.

Designed for critical single pass point-of-use retention requirements, the UltiKleen HiT KC Assembly provides a high flow rate that makes it suitable for recirculation bath applications as well.

The improved non-dewetting property help enable semiconductor makers to meet the critical chemical process filtration requirements beyond 32 nm manufacturing. Pall’s advanced ultra low extractables, Me-KleenSM K7 post treatment process is also available to reduce metal ion extractables to a low single digit ppb total.

The UltiKleen G3 KC T-flow assembly has a slightly larger diameter than the UltiKleen G2 KC T-flow assembly, but it has the same face-to-face sealing distance.1 This makes interchanging assemblies easy. The increased diameter of the G3 assembly contains a larger format UltiKleen Excellar ER filter with increased filter area and robust supports for higher flow rates and longer service life.
  • Enhanced retention of particles in high temperature
  • Greater than 95% retention of 15 nm gold colloids
  • Large nominal filter area of 2.6 m2/28 ft2
  • High flow rates
  • All ultra high purity fluoro-polymer construction
  • Low extractables (Me-Kleen K7 option is available)
  • 100% prewetted with ultrapure water in package
  • Downstream core vent reduces potential for bubble collection and premature blockage

Specifications

Materials of Construction

 
Components Materials
Filter Medium Surface modified PTFE
Media Support PFA / PTFE
Inner Core PFA
Outer Cage PFA
End Caps PFA
Housing PFA
 

 
Product Name UltiKleen G3 HiT KC Assemblies UltiKleen G2 HiT KC Assemblies
Removal Ratings 30 nm 15 nm 30 nm 15 nm
Nominal Filter Area 2.1 m2 / 23 ft2 2.6 m2 / 28 ft2 1.3 m2 / 14 ft2 1.7 m2 / 18 ft2
Configurations T-flow, In-line T-flow, In-line, L-flow
Maximum Operating Temperature 180 ºC / 356 ºF
Maximum Operating Pressure 0.5 MPaG (72.5 psig) @ 25 ºC (77 ºF)
0.4 MPaG (58.0 psig) @ 60 ºC (140 ºF)
0.35 MPaG (50.7 psig) @ 90 ºC (194 ºF)
0.20 MPaG (29.0 psig) @ 120 ºC (248 ºF)
0.15 MPaG (21.8 psig) @ 150 ºC (302 ºF)
0.12 MPaG (17.4 psig) @ 180 ºC (356 ºF)
 

UltiKleen G3 HiT KC Assemblies
Dimensions (nominal)




UltiKleen G2 HiT KC Assemblies
Dimensions (nominal)




G2 Kleen-Change Assembly (LDFG/LDFV)

 
In-Line Nominal Length
(L) (mm / in.)
T-style Nominal Length
(L) (mm / in.)
VT-style Nominal Length
(L) (mm / in.)
12E2 396.5 / 15.6 12E2 408/ 16.1 12E2 377 / 14.8
12E51 412 / 16.2 12E71 403 / 15.9 128E2 385 / 15.2
124E51 412 / 16.2 13E0 495 / 19.5 12E71/72 377 / 14.8
16E8 428 / 16.9 13E1 432 / 17 128E71/72 402 / 15.8
16E51 436 / 17.2 13E2 442 / 17.4 13E1 445 / 17.5
17E0 448 / 17.6 13E6 416 / 16.4 13E51 444 / 17.4
17E1 445 / 17.7 13E9 433 / 17.1 168E71/72 403 / 15.9
17E51 442 / 17.4 13E51 473 / 18.6  
17E71 462 / 18.2 13E71 444 / 17.5
  L-style VL-style
12E2 408 / 16.1 12E2 440 / 17.35
 
3 Pillar is a trademark of Nippon Pillar Packing Co.

Performance

Pressure Drop vs. Liquid Flow Rate2

UltiKleen G3 HiT KC Assemblies
1 inch T-flow, In-line


34 inch T-flow, In-line



UltiKleen G2 HiT KC Assemblies
1 inch T-flow, In-line


34 inch T-flow, In-line, L-flow


2 For liquids other than water, multiply differential pressure by fluid viscosity (cP). Unit conversion: 1 bar = 0.1 MPa

Type

Filter Capsules

Ordering Information

Ordering Information - UltiKleen G3 HiT KC Assemblies

Part Number = LDFH [1] 1HGP [2] [3] E [4] [5]

Table 1

 
Code Flow
T T-flow
N In-line
 

Table 2

 
Code Removal ratings
15 15 nm
30 30 nm
 

Table 34

 
Code Inlet/outlet Vent/drain Memo
Head end Bowl end
12 34 in. male 12 in. male 12 in. female T-flow
128 34 in. male 12 in. male 12 in. male T-flow
16 1 in. male 12 in. male 12 in. female T-flow
164 1 in. male 14 in. male 14 in. male In-line
168 1 in. male 12 in. male 12 in. male T-flow
 

Table 4

 
Code Connections
2 Super Pillar Type (Nippon Pillar)
51 Flare style
71 Super Pillar 300 P Series (Nippon Pillar)
72 Super Pillar 300 P Series L Type (Nippon Pillar)
 

Table 5

 
Code Prewet option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water), low metal extractables5
 

Ordering Information - UltiKleen G2 HiT KC Assemblies

Part Number = LDF [1] 1HGP [2] [3] E [4] [5]

Table 1

 
Code Flow
VT T-flow
GN In-line
VL L-flow
 

Table 2

 
Code Removal ratings
15 15 nm
30 30 nm
 

Table 34

 
Code Inlet/outlet Vent/drain Memo
Head end Bowl end
12 34 in. male 12 in. male 12 in. female T-flow / L-flow
12 34 in. male 38 in. male 38 in. male In-line
124 34 in. male 14 in. male 14 in. male In-line
128 34 in. male 12 in. male 12 in. male T-flow
13 34 in. female 12 in. female 12 in. female T-flow
16 1 in. male 12 in. male 12 in. female T-flow
16 1 in. male 38 in. male 38 in. male In-line
164 1 in. male 14 in. male 14 in. male In-line
168 1 in. male 12 in. male 12 in. male T-flow
17 1 in. female 12 in. female 12 in. female In-line
 

Table 4

 
Code Connections
0 No connection
1 20 Series (Flowell)
2 Super Pillar Type (Nippon Pillar)
51 Flare style
6 Final Lock (Krabo)
71 Super Pillar 300 P Series (Nippon Pillar)
72 Super Pillar 300 P Series L Type (Nippon Pillar)
9 11CR Series (Flowell)
 

Table 5

 
Code Prewet option
-K3 Prewet filter (packaged in DI water)
-K7 Prewet filter (packaged in DI water), low metal extractables5
 
4 Disposable capsules are not available with every option. Please contact Pall for part number availability.
5 Please contact Pall for the extractable conditions.

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