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UltiKleen™ Excellar ER JKC Assemblies product photo Primary L

UltiKleen™ Excellar ER JKC Assemblies

The UltiKleen Excellar ER filters show enhanced retention (ER) and improved non-dewetting properties over previous designs. These properties enable semiconductor makers to meet the chemical process filtration requirements of the 22 nanometer manufacturing node and beyond. The result is a robust, reliable, and chemically clean filter suitable for use in aggressive cleaning chemistries such as SPM, SC-1 and SC-2. The JKC (Junior Kleen-Change®) assembly is a completely disposable filter unit and is designed for critical singlepass, point-of-use retention.

Features

  • Enhanced retention (ER) of particles
  • Robust non-dewetting PTFE medium
  • High flow rates
  • Hyperfine porous media matrix design
  • All ultra high purity fluoro-polymer construction
  • 100% integrity tested
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Description

The UltiKleen Excellar ER filters show enhanced retention (ER) and improved non-dewetting properties over previous designs. These properties enable semiconductor makers to meet the chemical process filtration requirements of the 22 nanometer manufacturing node and beyond. The result is a robust, reliable, and chemically clean filter suitable for use in aggressive cleaning chemistries such as SPM, SC-1 and SC-2. The JKC (Junior Kleen-Change®) assembly is a completely disposable filter unit and is designed for critical singlepass, point-of-use retention.

Features

  • Enhanced retention (ER) of particles
  • Robust non-dewetting PTFE medium
  • High flow rates
  • Hyperfine porous media matrix design
  • All ultra high purity fluoro-polymer construction
  • 100% integrity tested

Specifications

Materials of construction

 
Components Materials
Filter Medium Surface modified PTFE
Media Support PFA
Core / Outer Cage PFA
End Caps PFA
Housing PFA
 

Removal Ratings and Operating Conditions

 
Removal Ratings 20 nm, 15 nm
Configurations In-line
Nominal Filter Area 1300 cm2 / 1.4 ft2
Maximum Operating Temperature 120 °C / 248 °F
Maximum Operating Pressure 0.50 MPaG < 25 °C / 73 psig < 77 °F
0.20 MPaG < 90 °C / 28 psig < 194 °F
0.15 MPaG < 120 °C / 21 psig < 248 °F
 


Dimensions2

2Nominal length

Performance

Pressure Drop vs. Liquid flow Rate1 (Water, 20℃)



1 Typical flowrates. For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.


Unit conversion: 1 bar = 100 kPa

Type

Filter Capsules

Ordering Information

LDFN 03 [1] [2] E [3] [4]


Table 1

 
Code Removal Ratings
GP15 15 nm
GPK 20 nm
 

Table 2

 
Code Inlet /Outlet Vent / Drain
062 ⅜ in male ¼ in male
7 ⅜ in female ¼ in female
082 ½ in male ¼ in male
 

Table 3

 
Code Connections
0 Non-connection
1 20 series (Flowell)
2 Super Pillar Type (Nippon Pillar) 3
51 Flare style
71 Super Pillar 300 P series (Nippon Pillar)
72 Super Pillar 300 P series L type (Nippon Pillar)
 

Table 4

 
Code Prewet Option
K3 Prewet filter (packaged in DI water)
K7 Prewet filter (packaged in DI water), Low metal extractables 4
 

2 06 and 08 are available for Flare style connection.
3 Pillar is a trademark of Nippon Pillar Packing Co.
4 Please contact Pall on the extractable conditions.
5 Part numbers in conbination with all codes are not always availbale.
Please contact Pall for the part number availability.

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