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Download:Description
Profile Star filters are pleated, all polypropylene depth filters ideally suited for the removal of agglomerated particles and gels from slurries used in the chemical mechanical polishing (CMP) of oxide, tungsten and copper.
- Deep, wide pleats for long service life in liquids with high levels of suspended solids
- High filter area, combined with continuously profiled pore structure minimizes sheer
- Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles
Specifications
Specifications
Materials of Construction
Components | Materials |
Filter Medium | Polypropylene |
Support and drainage | Polypropylene |
Core,cage and end caps | Polypropylene |
Housing (DFA) | Polypropylene |
Gasket options | EPDM, Polypropylene |
O-ring options | EPDM, Silicone, Fluoroelastomer |
Product Name | 10 inch cartridges | DFA capsules |
Removal Ratings (μm) | 0.8, 1, 1.5, 3, 5, 10, 15 | 0.8, 1, 1.5, 3, 5 |
Maximum Operating Temperature | 80 °C / 176 °F | 38 °C / 100 °F |
Maximum forward differential pressure | 0.50 MPa / 70 psid @ 50 °C / 120 °F 0.34 MPa / 50 psid @ 80 °C / 176 °F | 0.34 MPa / 50 psid @ 80 °C / 176 °F |
Maximum Operating Pressure | - | 0.49 MPaG / 71 psig @ 38 °C / 100 °F |
Performance
Pressure Drop vs. Liquid Flow Rate1 (Water 20 ºC )
1 Typical flow rates. For liquids with a viscosity differing from water, multiply the pressure drop by the viscosity in centipoise.
Unit conversion: 1 bar = 0.1 MPa
Type
Filter Cartridges
Ordering Information
Part Numbers Ordering Information
Gasket Seal Filters
PUY [1] A [2] [3]
Table 1
Code | Cartridge Length (Nominal) |
1 | 254 mm / 10 in |
2 | 508 mm / 20 in |
3 | 762 mm / 30 in |
Table 2
Code | Removal Ratings2 (μm) |
008 | 0.83 |
010 | 14 |
015 | 1.5 |
030 | 3 |
050 | 5 |
100 | 10 |
150 | 15 |
Table 3
Code | Gasket Materials |
J | EPDM (Standard) |
Y1 | Polypropylene |
O-ring Seal Filters
AB [1] A [2] [4] [5]
Table 4
Code | O-ring Specifications |
3 | AS568A-222 |
7 | AS568A-226 |
255 | AS568A-222 |
Table 5
Code | Gasket Materials |
J | EPDM (Standard) |
H4 | Silicone |
H | Fluoroelastomer |
2 Removal ratings at 99.98% efficiency based on a modified OSU-F2 single pass test in aqueous medium.
3 Removal ratings at 94% efficiency.
4 Removal ratings at 99.8% efficiency.
5 Options for 0.8 μm only.
DFA Capsules
DFA [6] A [7]
Table 6
Code | Connections | Vent / Drain | ||
Tube size | Configurations | Tube size | Configurations | |
4201 | 1/4" in | NPT male | 1/8" in | NPT male |
5301 | 16 mm | 1/4" Swagelok6 | 4 mm | Swagelok |
Table 5
Code | Removal Ratings1 (μm) |
008 | 0.83 |
010 | 1 |
015 | 1.5 |
030 | 3 |
050 | 5 |
6 Swagelok is a trademark of Swagelok Co.
Representative example part numbers
AB1A00825J | AB1A0503J |
AB2A00825J | AB2A0503J |
AB1A0103J | AB1A1003J |
AB2A0103J | AB2A1003J |
AB1A0153J | AB1A2003J |
AB2A0153J | AB2A2003J |
AB1A0303J | |
AB2A0303J |
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