Mini Kleen-Change® Filter Assembly (Lithography) product photo Primary L

Mini Kleen-Change® Filter Assembly (Lithography)

The Mini Kleen-Change filter assembly is designed for small scale dispense applications where low hold-up volume and cleanliness are critical. The low hold-up volume is ensured by the very small footprint. Cleanliness and compatibility are ensured by the all fluoro-polymer construction.

20nm grade has newly added to this product line that allows to remove more finer particles for the leading-edge industries.

  • Low hold-up volume
  • All fluoro-polymer construction
  • No elastomeric seals
  • Cleanroom manufactured


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Description
The Mini Kleen-Change filter assembly is designed for small scale dispense applications where low hold-up volume and cleanliness are critical. The low hold-up volume is ensured by the very small footprint. Cleanliness and compatibility are ensured by the all fluoro-polymer construction.

20nm grade has newly added to this product line that allows to remove more finer particles for the leading-edge industries.

  • Low hold-up volume
  • All fluoro-polymer construction
  • No elastomeric seals
  • Cleanroom manufactured
Specifications

Materials of Construction

 
Components Materials
Filter Media PTFE
Support and Drainage FEP / PTFE
Core, Cage, and End Caps PFA
Housing PFA
 


 
Removal Ratings 20 nm, 0.05 µm, 0.1 µm
Filter Area 320 cm2 / 50 in2
Connections Inlet / Outlet : ¼” Super Pillar Fitting *
Vent / Drain : ¼” Super Pillar Fitting *
Maximum Operating Temperature 248 °F / 120 °C
Maximum Operating Pressure 58 psi @ 77 °F / 0.4 MPa @ 25 °C
29 psi @ 194 °F / 0.2 MPa @ 90 °C
22 psi @ 248 °F / 0.15 MPa @ 120 °C
 
* Super Pillar is a trademark of Pillar Packing Co., Ltd.
Performance

Pressure Drop vs. Liquid Flow Rate (Water, 20°C)1

Pressure Drop vs. Liquid Flow Rate
1For liquids with viscosity differing from water, multiply the pressure drop by the viscosity in mPa•s.
Type
Filter Capsules
Ordering Information

Part Numbers / Ordering Information

 
Code Removal ratings Length L (in / mm)
FK 20 nm 4.25 / 108
F0005 0.05 µm
F001 0.1 µm
 
Application
Photolithography