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Ultramet-L® 4400 Series Assembly product photo Primary L

Ultramet-L® 4400 Series Assembly

The Ultramet-L 4400 Series Filter Assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 3 nanometer filtration of semiconductor grade gases. The 4400 series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel. For applications with corrosive gases, such as halogen containing acid gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.
  • State-of-the-art 316L stainless steel or nickel media
  • Preconditioned to ultraclean levels
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • Housing material meets or exceeds VIM VAR specifications.


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Description
The Ultramet-L 4400 Series Filter Assembly is available with an all 316L stainless steel housing and either a 316L stainless steel or nickel filter. It is designed for ≥ 3 nanometer filtration of semiconductor grade gases. The 4400 series filter is recommended for all applications with process gases that are compatible with 316L stainless steel or nickel. For applications with corrosive gases, such as halogen containing acid gases, the nickel filter assembly is recommended only if the gas is known to be anhydrous.
  • State-of-the-art 316L stainless steel or nickel media
  • Preconditioned to ultraclean levels
  • Excellent particle removal efficiency vs. pressure drop
  • Accommodates extremely high flow rates for the assembly size
  • Excellent gas displacement and desorption characteristics
  • High temperature and pressure capabilities
  • Compact size for ease of installation
  • Wide variety of fitting options available
  • 100% helium leak tested
  • Cleanroom manufactured and packaged
  • Housing material meets or exceeds VIM VAR specifications.
Specifications
 
 
Materials
  • Electropolished 316L stainless steel housing
  • ≤ 0.18 mm / 7 μin Ra internal surface finish
  • Cr:Fe (1:1) Chromium enriched internal surface chemistry
  • VAR PLUS housing material meets or exceeds typical VIM/VAR specifications
  • 316L stainless steel or nickel filter media
Removal Rating
  • ≥ 3 nm
Preconditioned Cleanliness*
  • < 10 ppb moisture contribution (Qualified per SEMSPEC test method #90120397B-STD)
  • < 10 ppb THC contribution (Qualified per SEMSPEC test method #90120396B-STD)
  • < 10 ppb O2 contribution (Qualified per SEMSPEC test method #90120398B-STD)
  • No particle contribution above background ≤ 1 particle/(ft3 or m3)
Connections
  • 14 in., 12 in. Gasket Seal, Male/Male (VCR1 or compatible)
  • 14 in. Butt Weld (0.035 in. / 0.89 mm wall)
Operating Conditions
  • Maximum Operating Pressure:
    20.7 MPa at 38 °C / 3,000 psig at 100 °F;
    11.6 MPa at 450 °C / 1,685 psig at 840 °F
  • Maximum Allowable Differential Pressure:
    316L Stainless Steel Filter:
    0.9 MPa at 38 °C / 125 psid at 100 °F;
    0.4 MPa at 450 °C / 60 psid at 840 °F
    Nickel Filter:
    1.0 MPa at 38 °C / 150 psid at 68 °F
    0.5 MPa at 426 °C / 75 psid at 800 °F
Particle Removal Characteristics
  • 109 particle reduction at 50 slpm / 1.76 scfm
Leak Rating
  • 100% helium leak tested to 10-9 atm•cm3/s
  • Design validated to 10-11 atm•cm3/s
 
* Gasket Seal only fittings.
1 VCR is a trademark of Swagelok Co.

Dimensions

Dimensions
Performance

Pressure Drop vs. Gas Flow Rate

GLFF4400VMM4 - Stainless Steel

GLFF4400VMM4 - Stainless Steel

GLFN4400VMM4 - Nickel

GLFN4400VMM4 - Nickel
Type
Assemblies
Use
Filtration
Ordering Information
 
Part Number Description Fitting Type (in. / mm) Length (L)
GLFF4400VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 (L1)
GLFF4400BW4 All 316L Stainless Steel 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 1.75 / 45 (L2)
GLFN4400VMM4 Nickel Media, 316L Stainless Steel Housing 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 (L1)
GLFN4400VFM4 Nickel Media, 316L Stainless Steel Housing 14 in. Gasket Seal (VCR or Compatible) Female Inlet/Male Outlet 2.80 / 71 (L1)
GLFN4400VMF4 Nickel Media, 316L Stainless Steel Housing 14 in. Gasket Seal (VCR or Compatible) Male Inlet/ Female Outlet 2.80 / 71 (L1)
GLFN4400VMM8 Nickel Media, 316L Stainless Steel Housing 12 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 (L1)
GLFN4400BW4 Nickel Media, 316L Stainless Steel Housing 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 1.75 / 44 (L2)
 
Unit conversion: 1 bar = 100 kilopascals
Application
Process gas filtration