1. Home/
  2. Microelectronics/
  3. Semiconductor/
  4. Process gas filtration/
  5. PFA Gaskleen® 6101 Series Filter Assembly
PFA Gaskleen® 6101 Series Filter Assembly product photo Primary L

PFA Gaskleen® 6101 Series Filter Assembly

The PFA-Gaskleen® 6101 Series Filter Assembly is specifically designed for ≥ 3 nanometer (0.003 μm) filtration of oxygen and specialty gases.
  • 316L stainless steel electropolished housing
  • All fluoro-polymer element
  • Wide range of chemical compatibility
  • High temperature and pressure capabilities
  • Available in both standard and shortened version
  • Wide variety of fitting options available
  • Compact size (2.2 in. / 56 mm dia.) for ease of installation
  • 100% integrity tested
  • Cleanroom manufactured and packaged
  • 100% helium leak tested
Read More


Contact Us
* Required

Documents

Datasheets

Download: English | Japanese | Korean

Description

The PFA-Gaskleen® 6101 Series Filter Assembly is specifically designed for ≥ 3 nanometer (0.003 μm) filtration of oxygen and specialty gases.
  • 316L stainless steel electropolished housing
  • All fluoro-polymer element
  • Wide range of chemical compatibility
  • High temperature and pressure capabilities
  • Available in both standard and shortened version
  • Wide variety of fitting options available
  • Compact size (2.2 in. / 56 mm dia.) for ease of installation
  • 100% integrity tested
  • Cleanroom manufactured and packaged
  • 100% helium leak tested

Specifications

 
Filter Medium PTFE
Core and end caps PFA 440HP
O-ring FEP encapsulated fluoroelastomer
internal surface finish ≤ 25 μin / 0.64 μm Ra
Housing Electropolished 316L stainless steel
Housing material meets or exceeds VIM / VAR specifications
Removal Rating ≥ 3 nm
Filter Area < 232 cm2 / 0.25 ft2
Connections 1⁄4" Gasket Seal, Male
(VCR1 or compatible)
1⁄4" Compression Seal
(Swagelok1 or compatible)
3⁄8" Gasket Seal, Male
(VCR or compatible)
3⁄8" Compression Seal
(Swagelok or compatible)
Leak Rating 100% helium leak tested to 10-7 atm•cm3/s
Design validated to 10-9 atm•cm3/s
Maximum Operating Pressure 750 psig @ 250 °F / 52 bar @ 121 °C
Maximum Forward Differential Pressure 100 psid @ 70 °F / 7 bar @ 21 °C
Maximum Reverse Differential Pressure 50 psid @ 70 °F / 3.4 bar @ 21 °C
Packaging Double bagged
Outer bag: aluminized mylar
Inner bag: polyethylene
N2 purged
 

1 VCR and Swagelok are trademarks of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

Connection Size: .25 in.

Connection Size: .25 in.

Connection Size: .375 in.

Connection Size: .375 in.

Type

Filter Capsules

Ordering Information

 
Part Number Description Length (L)
(in. / mm)
GLFPF6101VM4 PFA Gaskleen, 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male 5.56 / 141
GLFPF6101SM4S PFA Gaskleen, 1⁄4 in. Compression Seal (Swagelok or Compatible) Male/Male 5.56 / 141
GLFPF6101SM6S PFA Gaskleen, 3⁄8 in. Compression Seal (Swagelok or Compatible) Male/Male 5.81 / 148
GLFPF6101VM6/8 PFA Gaskleen, 3⁄8 in. Gasket Seal (VCR or Compatible) Male/Male 5.81 / 148
SGLFPF6101VM4 Short PFA Gaskleen, 1⁄4 in. Gasket Seal (VCR or Compatible) Male/Male 4.94 / 125
SGLFPF6101VM6/8M Short PFA Gaskleen, 3⁄8 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127
SGLFPF6101SM4S Short PFA Gaskleen, 1⁄4 in. Compression Seal (Swagelok or Compatible) Male/Male 4.19 / 106
 

Unit conversion: 1 bar = 100 kilopascals

Reviews

We appreciate your review of this product. Please login to your account to leave a review.