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Gaskleen® TM Filter Assemblies 1 1/8'' W-Seal product photo Primary L

Gaskleen® TM Filter Assemblies 1 1/8'' W-Seal

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.

  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel or nickel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment
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Description

Pall's Gaskleen Top Mount (TM) filter assemblies are designed for ≥ 3 nanometer filtration of semiconductor process gases. The top mount filter is well-suited for integrated gas delivery systems, providing easy access and change out.

  • Electropolished 316L stainless steel housing
  • State-of-the-art 316L stainless steel or nickel filter medium
  • High temperature and pressure capabilities
  • Excellent gas displacement and desorption characteristics
  • 100% helium leak tested
  • Manufactured and packaged in a cleanroom environment

Specifications

Materials of Construction

Filter Medium GTMF1013F4A: 316L stainless steel
GTMN1013F4A: Nickel
GTMF3700F4A: 316L stainless steel
Internal Surface Finish ≤ 5 μin / 0.13 μm Ra
Housing Electropolished 316L stainless steel Housing material meets or exceeds VIM/VAR specifications.
Internal housing surface chemistry Cr:Fe (1:1) chromium-enriched
Removal Rating ≥ 3 nm
Particle Removal Characteristics GTMF1013F4A: 109 particle reduction up to 5 slpm
GTMN1013F4A: 109 particle reduction up to 3 slpm
GTMF3700F4A: 109 particle reduction up to 100 slpm
Connections W-seal, 1 1/8" interface
Leak Rating 100% helium leak tested to 10-9 atm cm3 / sec Design validated to 10-11 atm cm3 / sec
Maximum Operating Pressure 3.4 MPa @ 100 ºC / 500 psig @ 212 ºF
Maximum Allowable Differential Pressure 0.69 MPa @ 40 ºC / 100 psid @ 104 ºF
EU pressure equipment directive Assemblies have been evaluated and designed using SEP per the European Union’s Pressure Equipment Directive 2014/68/EU and are not CE marked.

Performance

Pressure Drop vs. Gas Flow Rate

F1013

F1013

F3700

F3700

Type

Filter Capsules

Additional Information

Dimensions

F1013

F1013

Ordering Information

Part Number Description Height
(mm / in.)		 Design Flow
Rate (slpm)
GTMF1013F4A All 316L stainless steel 36.8 / 1.45 0 - 5
GTMN1013F4A 316L stainless steel housing Nickel filter 40.2 / 1.45 0 - 3
GTMF3700F4A 316L stainless steel 79.3 / 3.12 0 - 100

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