Gasket-Sert™ Filter product photo Primary L

Gasket-Sert™ Filter

The Gasket-Sert filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
  • True in-line design and easy installation
  • Fits in place of standard .25 in. VCR Gasket
  • Available in 316L or Hastelloy C-22
  • Gasket material Nickel 200
  • Broad compatibility with process gases
  • Low differential pressure
  • All metal construction
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs


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Description

The Gasket-Sert filter is designed to protect major components of gas panels employed in semiconductor gas distribution systems.
  • True in-line design and easy installation
  • Fits in place of standard .25 in. VCR Gasket
  • Available in 316L or Hastelloy C-22
  • Gasket material Nickel 200
  • Broad compatibility with process gases
  • Low differential pressure
  • All metal construction
  • Dried with high purity nitrogen
  • Cleanroom packaged
  • No particle contribution above background
  • No housing required
  • Retrofit of existing panels without reconfiguring of systems
  • Zero displacement
  • Protection for regulators and MFCs

Specifications

Materials Medium 316L Stainless Steel or Hastelloy C-22
Gasket Nickel 200
Removal Rating ≥ 0.4 μm
Recommended Flow Range 0-10 SCFM / 0-280 slpm
Maximum Operating Temperature Non-Corrosive Gases 840 °F / 450 °C
Corrosive Gases 70 °F / 21 °C
Maximum Differential Pressure 316L Stainless Steel 400 psid @ 840 °F / 27 bar @ 450 °C
750 psid @ 100 °F / 52 bar @ 38 °C
Hastelloy C-22 500 psid @ 100 °F / 34 bar @ 38 °C

Performance

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

Type

Accessories and Spare Parts

Ordering Information

Part Number Material of Construction Fitting Type
CNL3004VNG4 316L Stainless Steel Media, Nickel 200 Gasket 14 in. VCR
CNC3004VNG4R Hastelloy C-22 Media, Nickel 200 Gasket 14 in. VCR

Unit conversion: 1 bar = 100 kilopascals

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