Ultramet-L® 5500 Series Filter Assembly product photo Primary L

Ultramet-L® 5500 Series Filter Assembly

The Ultramet-L® 5500 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency versus pressure drop
  • Excellent gas displacement and desorption characteristics
  • High temperature capabilities
  • Compact size
  • 100% helium leak tested
  • Clean room manufactured and packaged
  • Available preconditioned
  • CE marked in accordance with PED 97/23/EC


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Description

The Ultramet-L® 5500 Series Filter Assembly is an all 316L stainless steel filter designed for ≥ 3 nanometer (0.003 μm) filtration of semiconductor process gases.
  • All 316L stainless steel construction
  • State-of-the-art 316L stainless steel media
  • Excellent particle removal efficiency versus pressure drop
  • Excellent gas displacement and desorption characteristics
  • High temperature capabilities
  • Compact size
  • 100% helium leak tested
  • Clean room manufactured and packaged
  • Available preconditioned
  • CE marked in accordance with PED 97/23/EC

Specifications

Filter Medium 316L stainless steel
Internal Surface Finish 5500: ≤ 10 μin / 0.25 μm Ra
5502: ≤ 0.7 μm Rmax
Housing Electropolished 316L stainless steel
Housing material meets or exceeds VIM / VAR specifications
Removal Rating ≥ 3 nm
Particle Removal Characteristics 109 particle reduction up to 150 slpm
Preconditioned Option1
(5502 Series)
< 10 ppb moisture contribution (Qualified per SEMASPEC test method #90120397B-STD)
< 10 ppb thc contribution (Qualified per SEMASPEC test method #90120396B-STD)
< 10 ppb 02 contribution (Qualified per SEMASPEC test method #90120398B-STD)
No particle contribution above background ≤ 1 particle / (ft3 or m3)
Connections 1⁄4" Gasket Seal Male / Male (VCR2 or compatible)
1⁄4" Butt Weld Male / Male (0.035" / 0.89 mm wall)
1⁄2" Gasket Seal Male / Male (VCR or compatible)
1⁄2" Butt Weld (0.049" / 1.24 mm wall)
Maximum Operating Pressure 750 psig @ 100 °F / 51.7 bar @ 38 °C
550 psig @ 800 °F / 38 bar @ 426 °C for inert gases only
Maximum Allowable Differential Pressure 75 psid @ 68 °F / 5.2 bar @ 20 °C
Leak Rating 100% helium leak tested to 10-9 atm•cm3/s
Design validated to 10-11 atm•cm3/s
EU pressure equipment directive Assemblies have been evaluated and are CE marked per the European Union’s Pressure Equipment Directive 2014/68/EU

1 The 5500 Series Filter Assembly is also available with a nickel filter. Contact Pall Microelectronics for more information.
2 VCR is a registered trademark of Swagelok Co.

Performance

Pressure Drop vs. Gas Flow Rate

Pressure Drop vs. Gas Flow Rate

Type

Assemblies

Use

Filtration

Ordering Information

Part Number Description Fitting Type Length (L)
(in. / mm)
Preconditioned
GLFF5500VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 No
GLFF5500VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 No
GLFF5500BW4 All 316L Stainless Steel 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 2.50 / 64 No
GLFF5500BW8 All 316L Stainless Steel 12 in. Butt Weld, 0.049 in. / 1.24 mm wall 2.50 / 64 No
GLFF5502VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 Yes
GLFF5502VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 5.00 / 127 Yes
GLFF5502BW4 All 316L Stainless Steel 14 in. Butt Weld, 0.035 in. / 0.89 mm wall 2.50 / 64 Yes
GLFF5502BW8 All 316L Stainless Steel 12 in. Butt Weld, 0.049 in. / 1.24 mm wall 2.50 / 64 Yes
SGLFF5500VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 No
SGLFF5500VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 No
SGLFF5502VMM4 All 316L Stainless Steel 14 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 Yes
SGLFF5502VMM8 All 316L Stainless Steel 12 in. Gasket Seal (VCR or Compatible) Male/Male 3.31 / 84 Yes

Unit conversion: 1 bar = 100 kilopascals

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