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The Pall SWD and SWF small capsules are space-saving and low pressure drop disposable filter assemblies. They are ideally suited for installing into single wafer cleaning systems at the point of use (POU) .
The unique fluid flow path filter design combined with Pall material science membrane technology provides the reliable removal of critical nanometer size contaminants in fluids to prevent defects on wafers.
The SWD capsule contains Pall’s proprietary Ultipleat® SP DR “HAPAS”1 membrane filter. The HAPAS membrane is designed specifically for improved particle removal in critical surface preparation single wafer cleaning chemicals such as DHF, UPW, SC1, SC2, TMAH and many aqueous chemicals. The SP DR filter features a highly asymmetrical membrane construction developed using Pall’s proprietary membrane modeling technology (MMT).
The pore size distribution of the HAPAS membrane transitions uniformly from microporous to nanoporous throughout its depth. The result is an application-specific membrane morphology designed for high flow and superior retention of particles down to 2 nanometers.
The SWF capsule contains Pall’s proprietary XpressKleenTM filter. The XpressKleen filter uses a new generation of surface modified and patent pending PTFE membrane designed for leading edge critical chemical processes. Applications include concentrated chemicals, IPA, DIO3 and other solvents.
Pall's completely integrated and advanced filter manufacturing capability extends from the PTFE resin to the finished filter device. The resulting filter’s reliability, purity, and ultra cleanliness speeds qualification and reduces process downtime following filter change.
Features
- Hyperfine microporous membrane matrix
- High surface energy membrane for minimal microbubble formation
- Faster tool qualification for reduced cost of ownership
- 100% prewetted shipment with ultrapure water package
- Compact space-saver, small capsules
Ideal filter installation before chemical dispense
1 HAPAS - Highly Asymmetric PolyArylSulfone membrane
Specifications
| Product Name | XpressKleen SWF Capsules | Ultipleat SP DR SWD Capsules |
| Membrane Materials | Surface modified PTFE | Highly Asymmetric PolyArylSulfone (HAPAS) |
| Hardware (Supports, Capsule) | PFA | HDPE |
| Removal Ratings | 5 nm | 10 nm | 5 nm | 2 nm |
| Filter Areas | 0.3 m2 / 3.2 ft2 | 0.25 m2 / 2.7 ft2 | 0.2 m2 / 2.2 ft2 |
| Configurations | U-flow | U-flow |
| Connections (Inlet / Outlet, Vent) | 1/4”, Super Pillar2 300 P series (Nippon Pillar) | |
| Maximum Operating Temperature | 130 °C / 266 °F | 60 °C / 140 °F |
| Maximum Operating Pressure | 0.35 MPaG / 50 psig @ 40 °C / 104 °F 0.29 MPaG / 42 psig @ 60 °C / 140 °F 0.24 MPaG / 34 psig @ 80 °C / 176 °F 0.20 MPaG / 29 psig @ 95 °C / 203 °F 0.18 MPaG / 26 psig @ 110 °C / 230 °F 0.15 MPaG / 21 psig @ 130 °C / 266 °F |
0.35 MPaG / 51 psig @ 38 °C / 100 °F 0.17 MPaG / 25 psig @ 60 °C / 140 °F |
| Maximum Forward Differential Pressure | 0.20 MPaG / 29 psig @ 95 °C / 203 °F 0.15 MPaG / 21 psig @ 130 °C / 266 °F |
0.1 MPaG / 15 psig @ 60 °C / 140 °F |
2 Pillar is a trademark of Nippon Pillar Packing Co.
Type
Additional Information
Dimensions (nominal)
Typical Flow Characteristics - 1cP fluid, 20℃
XpressKleen SWF Capsules Ultipleat SP DR SWD Capsules
Ordering Information
Part Numbers / Ordering Information
SW [1] 03 [2] 4E71 [3]
Table 1
| Code | Capsule Format | Capsule Materials |
| D | SWD | HDPE |
| F | SWF | PFA |
Table 2
| Code | Removal Ratings | Media Materials | Capsule Format Availability |
| HSAH | 2 nm | HAPAS | SWD |
| HSSH | 5 nm | HAPAS | SWD |
| HSVH | 10 nm | HAPAS | SWD |
| XP5 | 5 nm | PTFE | SWF |
Table 3
| Code | Prewet option | Applicable Capsule | Note |
| None | Standard with low extractables | SWF | |
| -K18 | Dry with low extractales | SWF | Nuts are not included in the box. |
| -K13C | Standard with low extractables | SWD | |
| -K13D | Standard with low extractables for 2 nm only | SWD | |
Connections (Inlet/Outlet, Vent) : 1/4”, Super Pillar 300 P series (Nippon Pillar)
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