Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Use

Pre-Filtration

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 10 inches

Product ID: NXT1510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
15 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXT20030UM8V
Unit of Measure
24/EA
Min Order Qty
24
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 20 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT20020UM3V
Unit of Measure
12/EA
Min Order Qty
12
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 10 inches

Product ID: NXT2510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
25 micron
NXT 3-10U-M3F product photo
Unit of Measure
60/EA
Min Order Qty
60
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches

Product ID: NXT340U
Unit of Measure
10/EA
Min Order Qty
10
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo
Unit of Measure
30/EA
Min Order Qty
30
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT530UM3S
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXT540U
Unit of Measure
10/EA
Min Order Qty
10
Micron
5 micron

WSFZ Top Centerpost Gasket

Product ID: PDC80102P
Unit of Measure
1/EA
Min Order Qty
1

KIT PDC20142S

Product ID: PDC20142S
Unit of Measure
1/EA
Min Order Qty
1

KIT PDC80020S

Product ID: PDC80020S
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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