Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

30 in

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, Nitrile product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, Nitrile

Product ID: PFT3030UN
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings with locking tabs product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, silicone, SOE fin end external 222 O-rings with locking tabs

Product ID: PFT3030USM4
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II Filter Cartridge, PFT3030USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT3030USM7W480

Product ID: PFT3030USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 225 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 225 O-ring

Product ID: PFT3030UEM22
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
PFT 30-30US-M8W 480 product photo

PFT 30-30US-M8W 480

Product ID: PFT3030USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial, No Bubble Test product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial, No Bubble Test

Product ID: PFT330UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 226 O-rings

Product ID: PFT330UEM7
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Nitrile, DOE industrial

Product ID: PFT330UN831
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, FEP encapsulated Fluorocarbon Elastomer Orings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, FEP encapsulated Fluorocarbon Elastomer Orings

Product ID: PFT330UFM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT330UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, EPDM, DOE industrial

Product ID: PFT330UE967
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II Filter Cartridge, PFT330USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT330USM7W480

Product ID: PFT330USM7W480
Unit of Measure
12/EA
Min Order Qty
12
Micron
3 µm
659 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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