Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, silicone, SOE fin end external 226 O-rings

Product ID: ARD140USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 Inches, Nitrile

Product ID: ARD130UNDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Nitrile
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 Inches, Expanded PTFE gaskets FEP encapsulated silicone O-rings

Product ID: ARD110UTM8
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Expanded PTFE (gaskets) FEP encapsulated silicone (O-rings)
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: ARD140UVM3
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
1 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

ARD 20-30UN-DOE

Product ID: ARD2030UNDOE
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® ARD, Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 20 Inches, DOE Santoprene gasket seal

Product ID: ARD2020UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
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ARD 1-9.75UE-DOE

Product ID: ARD1975UEDOE
Unit of Measure
1/EA
Min Order Qty
1

Poly-Fine® ARD, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 Inches

Product ID: ARD320UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 Inches

Product ID: ARD4010UEDOE
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 Inches

Product ID: ARD4020USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 19.75 Inches

Product ID: ARD401975UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.75 in
Cartridge Length (Metric)
502 mm
Cartridge Length (Metric)
50.2 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 3 μm, Length 30 Inches

Product ID: ARD330HWNM6
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
End Configuration
SOE flat closed end, external 226 O-rings
1,477 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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