Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Pre-Filtration

Filter Media

Polypropylene

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXA530UDOES
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
NXA 5-30U-M3E product photo

Nexis, NXA, 5 μm, 76.2 cm (30 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA530UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA530UDOEE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: NXA530UM8V
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, SOE fin end external 222 O-rings

Product ID: NXA540UM8N
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.75 inches

Product ID: NXA5975U
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 10 inches

Product ID: NXA7010U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
70 micron
NXA 70-10U-M7S product photo

Nexis, NXA, 70 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), Silicone gasket

Product ID: NXA7010UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
70 micron
NXA 7-20U-M3E product photo

Nexis, NXA, 7 μm, 50.8 cm (20 in), SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0), EPDM gasket

Product ID: NXA720UM3E
Unit of Measure
1/EA
Min Order Qty
1
Micron
7 micron
Poly-Fine® II Filter Cartridge, PFT02510UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02510UEW480

Product ID: PFT02510UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 10 Inches, silicone, DOE internal O-rings

Product ID: PFT02510USM10
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.25 µm
Membrane Material
Polypropylene
Industry-Specific Certification
General Use
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
See All Attributes
Poly-Fine® II Filter Cartridge, PFT02520UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02520UEW480

Product ID: PFT02520UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
172 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile II Filters for CMP Applications

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