Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT0530UM7S
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 30 inches

Product ID: NXA7030U946
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
NXT 100-30U-M7E product photo

Nexis, NXT, 100 μm, 76.2 cm (30 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT10030UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT10030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 30 inches

Product ID: NXT10030U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Series Filter Cartridges 30 in, 100 µm, Single Open End with Fin End, 2 Locking Tabs and External 226 O-ring

Product ID: NXT10030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT1030UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT1030UH21
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE fin end, external 226 O-rings

Product ID: NXT1030UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXT1030UM3S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT1030UM3E
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT1030U1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
See All Attributes

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :