Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Product Sub Type

Pleated Filters

Product Type

Filter Cartridges

5µm (nominal) CB Micro-Carbon™ II Series filter, 10", DOE with gaskets

Product ID: C10PCB5
Unit of Measure
12/EA
Min Order Qty
12

5µm (nominal) CB Micro-Carbon™ II Series filter, 20", DOE with gaskets

Product ID: C20PCB5
Unit of Measure
6/EA
Min Order Qty
6

Micro-Carbon™ II Series Filter 20 in, 5 µm

Product ID: C20PPHP
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Outer shell - Porous, high density polyethylene (70 µm nominal)
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Hercuprene
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Micro-Carbon™ II Series Filter 30 in 5 µm

Product ID: C30PPHP
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Outer shell - Porous, high density polyethylene (70 µm nominal)
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Hercuprene
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C9.75P-CB5

Product ID: C975PCB5
Unit of Measure
12/EA
Min Order Qty
12

Fluorodyne® II Filter Cartridges, 0.2µm, 20in, Single Open End Code 7, Silicone Elastomer O-ring

Product ID: AB2FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0 µm
Membrane Material
Polyvinylidene fluoride (PVDF)
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
H4
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Fluorodyne® II Filter Cartridges, AB3FSD7WH4

Product ID: AB3FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric cm²)
1.65 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Ultipor® N66 Filter Cartridges, Nylon Hardware, 0.45 µm Single Layer, 40 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: ABN4NB7BWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Fluorodyne® II Filter Cartridges, AB1FSD7WH4

Product ID: AB1FSD7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Hydrophilic polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric m²)
0.55 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Fluorodyne® II Junior Filter Cartridges, MCY4440FSDWH4

Product ID: MCY4440FSDWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
0.152 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
4.17 in
Cartridge Length (Metric)
106 mm
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY4440PFRWH4

Product ID: MCY4440PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2300 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
4.1 in
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY4463PFRWH4

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
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94 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile II Filters for CMP Applications

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