Profile® II Depth Filters for CMP Applications

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

• 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate¹

 

¹ For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.