Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Availability

In Stock

HDC® II, Filter Cartridges, Length 30 Inches, silicone

Product ID: AB3J0067H4
Unit of Measure
6/EA
Min Order Qty
6
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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CC3LG02H

Product ID: CC3LG02H
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
30 in
Coalescer Length (Metric)
76.2 cm
Coalescer Diameter (Imperial)
2.75 in

CC3LGB7H1

Product ID: CC3LGB7H1
Unit of Measure
1/EA
Min Order Qty
1
Coalescer Length (Imperial)
30 in
Coalescer Length (Metric)
76.2 cm
Coalescer Diameter (Imperial)
2.75 in

SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LG02H13
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
0.83 bar
Change out pressure drop (psid)
12 psid
Maximum differential pressure rating (bar)
2.75 bar
Maximum differential pressure rating (psid)
40 psid
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SepraSol L/G Coalescer, 30in length, 2.75in diameter, 99.999% at 0.3µm aerosol rating, 99.99% >0.3µm solids removal rating

Product ID: CC3LGA7H13
Unit of Measure
1/EA
Min Order Qty
1
Maximum Operating Temperature (F)
180 °F
Maximum Operating Temperature (C)
82 °C
Change out pressure drop (bar)
0.83 bar
Change out pressure drop (psid)
12 psid
Maximum differential pressure rating (bar)
2.75 bar
Maximum differential pressure rating (psid)
40 psid
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 20 inches, EPDM

Product ID: CLR120M8E
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, SOE plastic spring assembly saw cut end

Product ID: CLR140XK
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR520M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings

Product ID: CLR530M8S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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GASKE BUNA N ST

Product ID: D10512-061
Unit of Measure
1/EA
Min Order Qty
1

D10512-066 VITON GASKET

Product ID: D10512-066
Unit of Measure
1/EA
Min Order Qty
1

GASKET VITON ST

Product ID: D10512-062
Unit of Measure
1/EA
Min Order Qty
1
61 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile II Filters for CMP Applications

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