Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

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Product Type

Filter Cartridges

FEATURED

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 7 μm, GlassFiber, Length 13 inches

Product ID: HC9604FRN13H
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
7 µm
Membrane Material
Glass Fiber

A1449249

Product ID: A1449249
Unit of Measure
30/EA
Min Order Qty
30

AB2P70018JDUP

Product ID: AB2P70018JDUPTIMMD
Unit of Measure
1/EA
Min Order Qty
1

Profile® Star Filter Cartridge, AB3A0107WH4

Product ID: AB3A0107WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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AVS1M30

Product ID: AVS1M30
Unit of Measure
24/EA
Min Order Qty
24
DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 304 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 30 Inches, 304 stainless steel, Bulk packaging

Product ID: C010AW30A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: CLR140M3E
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
EPDM
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This product is currently not available. Please contact us for more information.

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches

Product ID: CLR539
Unit of Measure
12/EA
Min Order Qty
12
Length
99.1 cm / 39 in
Micron
5 micron

This product is currently not available. Please contact us for more information.

Claris, Polypropylene, 75 micron, 9.875 inch product photo

Claris, Polypropylene, 75 micron, 9.875 inch

Product ID: CLR759875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
75 micron

Duo-Fine® , Filter Cartridges, Removal Rating 30 μm

Product ID: DFN301401
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Change Out Differential Pressure
2.4 bard
Cartridge Outer Diameter (OD) (Imperial)
2.6 in
Cartridge Outer Diameter (OD) (Metric)
6.6 cm
Packaging Type
Standard packaging

Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Nitrile

Product ID: DFN310AN264
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Duo-Fine®, Filter Cartridges, Removal Rating 10 μm, Length 20 Inches

Product ID: DFPT1020ETM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
End Configuration Code
M3
End Configuration
SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0) 3
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This product is currently not available. Please contact us for more information.

563 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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