Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

CTRG PROFILE R4F 100 ECO TEC 12684

Product ID: 12684
Unit of Measure
9/EA
Min Order Qty
9
Filter 40" Profile II 0,5µm product photo

Filter 40" Profile II 0,5µm

Product ID: AB4Y0057J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

Filter 40" Profile II 5µm

Product ID: AB4Y05018J
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

CRTG AB4Y0308J

Product ID: AB4Y0308J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y30018J

Product ID: AB4Y30018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y10018J

Product ID: AB4Y10018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y03018J

Product ID: AB4Y03018J
Unit of Measure
12/EA
Min Order Qty
12

AB4Y10018H

Product ID: AB4Y10018H
Unit of Measure
12/EA
Min Order Qty
24
Filtro 1" Profile II 3µm product photo

Filtro 1" Profile II 3µm

Product ID: AB01Y03018J
Unit of Measure
3/EA
Min Order Qty
3
AB01Y20018J product photo

Filter 1" Profile II 20µm

Product ID: AB01Y20018J
Unit of Measure
3/EA
Min Order Qty
3

This product is currently not available. Please contact us for more information.

AB04P40018J

Product ID: AB04P40018JTIMMD
Unit of Measure
1/EA
Min Order Qty
1

AB04P00319J

Product ID: AB04P00319JTIMMD
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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