Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Brand

Profile®

CMC15748

Product ID: CMC15748
Unit of Measure
1/EA
Min Order Qty
1

RF-Style 1" Profile II 15µm

Product ID: R01F150
Unit of Measure
24/EA
Min Order Qty
24

Filtro Tipo RF 1" Profile II 10µm

Product ID: R01F100
Unit of Measure
6/EA
Min Order Qty
6

RF-Style 1" Profile II 40µm

Product ID: R01F400
Unit of Measure
6/EA
Min Order Qty
6
R05F030 product photo

RF-Style 5" Profile II 3µm

Product ID: R05F030
Unit of Measure
1/EA
Min Order Qty
1

RF-Style 19" Profile II 10µm

Product ID: R19F100
Unit of Measure
24/EA
Min Order Qty
24

RF-Style 19" Profile II 40µm

Product ID: R19F400
Unit of Measure
24/EA
Min Order Qty
24

RF-Style 19" Profile II 70µm

Product ID: R19F700
Unit of Measure
24/EA
Min Order Qty
24

R19F400

Product ID: R19F400TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

R19F300

Product ID: R19F300TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1

CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F005TIMONIUM
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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