Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Industries

Biotech

T-series Centramate™ Cassette, Omega PES membrane, 10 kDa molecular weight cut-off (MWCO), 0.01 m² effective filtration area (EFA) product photo

T-series Centramate™ Cassette, Omega PES membrane, 10 kDa molecular weight cut-off (MWCO), 0.01 m² effective filtration area (EFA)

Product ID: OS010T01
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
100 cm²
Membrane Material
Polyethersulfone (PES)
See All Attributes
T-series Centramate™ Cassette, Omega PES membrane, 100 kDa molecular weight cut-off (MWCO), 0.02 m² effective filtration area (EFA) product photo

T-series Centramate™ Cassette, Omega PES membrane, 100 kDa molecular weight cut-off (MWCO), 0.02 m² effective filtration area (EFA)

Product ID: OS100T02
Unit of Measure
1/EA
Min Order Qty
1
Effective Filtration Area (Metric)
200 cm²
Membrane Material
Polyethersulfone (PES)
See All Attributes

Ultipor® GF Plus Filter Cartridges, Removal Rating 2 μm, Length 20 inches

Product ID: AB2U220Z7H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation product photo

Emflon® II membrane in Kleenpak™ capsule, 0.2 µm sterilizing grade, 1700 cm² EFA, 1-1½ in. sanitary flange connections, suitable for gamma irradiation

Product ID: KA3V002PV1G
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Polyvinylidene fluoride (PVDF)
Effective Filtration Area (Metric)
1700 cm²
See All Attributes

Valve O-ring - PTFE

Product ID: KORH2P-104
Unit of Measure
1/EA
Min Order Qty
1
MBS1001P05H product photo

MBS1001P05H

Product ID: MBS1001P05H
Unit of Measure
1/EA
Min Order Qty
1
MBS1001P05H13 product photo

MBS1001P05H13

Product ID: MBS1001P05H13
Unit of Measure
1/EA
Min Order Qty
1
NXA 10-10U product photo

Nexis, NXA, 10 μm, 25.4 cm (10 in), DOE industrial (no end caps)

Product ID: NXA1010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXA130UM8S
Unit of Measure
12/EA
Min Order Qty
12
Micron
1 micron

Emflon® PFR Membrane in Novasip™ Capsules have lower installation costs than comparable systems. Its steam sterilizing durability provides a long service life and low maintenance costs. Novasip™ filters use polyethermide because of its strong withstanding features against elevated temperature and pressure. Designed with air and vent applications Novasip™ filters can be used in a range of operating conditions.

Supracap 50 depth filter capsules are designed for developing and optimizing a process during scale-up and scale-down studies. They can be used to quickly and accurately determine which series and grade of depth filter media will provide the best performance as well as the necessary filtration area required to meet process volume

27 Products In Family

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :