Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Food & Beverage

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Nexis® T Series Filter Cartridges, NXT2030UM7WS480 product photo

Nexis® T Series Filter Cartridges, Polypropylene, 20 µm, 30 in., Silicone Elastomer, M7

Product ID: NXT2030UM7WS480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Supor® Beverage Filter Cartridges, AB3SBK7WH4

Product ID: AB3SBK7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.65 µm
Membrane Material
PES
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric m²)
2.25 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
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PREcart PP II Filter Cartridges, 2 µm, 30 in, Silicone Elastomer, 499A120W073SP

Product ID: B12437
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
2 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
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Profile® Star Filter Cartridge, AB3A0307WH4

Product ID: AB3A0307WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® Star Filter Cartridge, AB3A0157WH4

Product ID: AB3A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® Star Filter Cartridge, AB3A1007WH4

Product ID: AB3A1007WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Fluorodyne® II Filter Cartridges, AB3FSD7WJ

Product ID: AB3FSD7WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Effective Filtration Area (Metric m²)
1.65 m²
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
J
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Profile® Star Filter Cartridge, AB3A0507WH4

Product ID: AB3A0507WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Emflon® HTPFRW Filter Cartridges, AB3HTPFR7WH4

Product ID: AB3HTPFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
25200 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.2 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3NA7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® N66 Filter Cartridges, Polyester Hardware, 0.65 µm Single Layer, 30 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB3NK7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.65 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone Elastomer
Gasket O-Ring Code
H4
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Ultipor® N66 Filter Cartridges, AB3NB7WH4

Product ID: AB3NB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Nylon
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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