Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Medical

HOUSING PCY1RFGN16H13 product photo

Polypropylene 10", 1" NPT, DOE (RF, crush seal for cartridges without gaskets)

Product ID: PCY1RFGN16H13
Unit of Measure
1/EA
Min Order Qty
1
HOUSING PCY2RFGN16H13 product photo

Polypropylene 20", 1" NPT, DOE (RF, crush seal for cartridges without gaskets)

Product ID: PCY2RFGN16H13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

HOUSING PCY27GN16H product photo

Polypropylene 20", 1" NPT, Code 7

Product ID: PCY27GN16H
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

4.5 µm, 40" Ultipleat High Flow Element

Product ID: HFU640UY045JUW
Unit of Measure
4/EA
Min Order Qty
4

20 µm, 40" Ultipleat High Flow Element

Product ID: HFU640UY200JUW
Unit of Measure
4/EA
Min Order Qty
4

40 µm, 60" Ultipleat High Flow Element

Product ID: HFU660UY400JUW
Unit of Measure
4/EA
Min Order Qty
4
SCO10UI-3/4 product photo

SCO10UI-3/4

Product ID: SCO10UI34
Unit of Measure
1/EA
Min Order Qty
1
SCO10UPI-3/4 product photo

SCO10UPI-3/4

Product ID: SCO10UPI34
Unit of Measure
1/EA
Min Order Qty
1
HOUSING IDL11GN16J product photo

Stainless steel, 10", 1" NPT, EPR seal for DOE cartridge (with gasket)

Product ID: IDL11GN16J
Unit of Measure
1/EA
Min Order Qty
1

Stainless steel, 20", 1" NPT, EPR seal for DOE cartridge (with gasket)

Product ID: IDL12GN16J
Unit of Measure
1/EA
Min Order Qty
1
HOUSING IOL71GN16J product photo

Stainless steel, 10", 1" NPT, EPR seal for Code 7 cartridge

Product ID: IOL71GN16J
Unit of Measure
1/EA
Min Order Qty
1

Fuente II Filter Cartridge, AB1FFN7WH4

Product ID: AB1FFN7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PES, with built in pre-filtration
Effective Filtration Area (Metric m²)
1.04 m²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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