Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Pall Water Shop

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel, Individually wrapped

Product ID: C005A10S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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Discontinued

This part is no longer available. Please contact us for more information.
10um, 50", 2.5 OD, 304 Stainless Steel, Individually wrapped product photo

10um, 50", 2.5 OD, 304 Stainless Steel, Individually wrapped

Product ID: C010AW50A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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40um, 50", 2.5 OD, 316 Stainless Steel, Individually wrapped product photo

40um, 50", 2.5 OD, 316 Stainless Steel, Individually wrapped

Product ID: C040AW50S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 20 Inches, 316 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 20 Inches, 316 stainless steel, Individually wrapped

Product ID: C050AW20S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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1um, 40", 2.5 OD, Polypropylene Core, Individually wrapped product photo

1um, 40", 2.5 OD, Polypropylene Core, Individually wrapped

Product ID: U001AW40U1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 40 Inches, Polypropylene, Individually wrapped

Product ID: U005AW40U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 30 Inches, Polypropylene, Individually wrapped

Product ID: U050AW30U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Length 40 Inches, Polypropylene, Individually wrapped

Product ID: U050AW40U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 20 Inches, Polypropylene, Individually wrapped

Product ID: U05AW20U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 20 Inches, Polypropylene, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, Length 20 Inches, Polypropylene, Individually wrapped

Product ID: U075AW20U1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches

Product ID: CLR1040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches

Product ID: CLR5040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
50 micron
13 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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