Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Sub Type

Pleated Depth Filters

Cartridge Length (Imperial)

30 in

Product Type

Filter Cartridges

Profile® UP Filter Cartridges, PUY3UY045WJ

Product ID: PUY3UY045WJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
4.5 µm
Membrane Material
Polypropylene
Industry-Specific Certification
W480 Food Contact
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® Star, Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Core

Product ID: AB3A0157H4
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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Profile® Star, FilterCartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Ethylene Propylene, Polypropylene Cage

Product ID: AB3A0307J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
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This product is currently not available. Please contact us for more information.

Profile® Star, FilterCartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches

Product ID: AB3A0153H1
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 1.5 μm, Polypropylene, Length 30 Inches, Ethylene Propylene

Product ID: AB3A0157J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, Ethylene Propylene

Product ID: AB3A0307PJ
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 Inches, silicone

Product ID: AB3A0307H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, silicone, Pall Code 7 double O-ring with bayonet lock and finned end

Product ID: AB3A0507H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, silicone, Polypropylene Cage

Product ID: AB3A1007H4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

This product is currently not available. Please contact us for more information.

Profile® Star, FilterCartridges, Removal Rating 10 μm, Polypropylene, Length 30 Inches, Ethylene Propylene, Polypropylene Cage

Product ID: AB3A1007J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
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This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, Ethylene Propylene, Polypropylene Core

Product ID: AB3A05018J
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Ethylene Propylene
See All Attributes

This product is currently not available. Please contact us for more information.

Profile® Star, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, Ethylene Propylene

Product ID: AB3A0507J
Unit of Measure
1/EA
Min Order Qty
6
Removal Rating
5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes
45 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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