Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Accessories and Spare Parts

1209414

Product ID: C1209414
Unit of Measure
1/EA
Min Order Qty
1

BAGS FLX BAND SEAL

Product ID: C1KHE315
Unit of Measure
50/EA
Min Order Qty
50

C2300872

Product ID: C2300872
Unit of Measure
1/EA
Min Order Qty
1

C-23-19-4PF

Product ID: C23194PF
Unit of Measure
1/EA
Min Order Qty
1

O-RING BS3601-144 FEP ENCAP FLUOROCARBON

Product ID: CA64550
Unit of Measure
1/EA
Min Order Qty
1

CCL4001G17H13

Product ID: CCL4001G17H13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

HC9000A104H ASSEMBLY PLUG

Product ID: HC9000A104H
Unit of Measure
1/EA
Min Order Qty
1

HC9000A104HSS ASSEMBLY PLUG

Product ID: HC9000A104HSS
Unit of Measure
1/EA
Min Order Qty
1

HC9020SBOWLS SPARE BOWL

Product ID: HC9020SBOWLS
Unit of Measure
1/EA
Min Order Qty
1

HC9020SBOWLR SPARE BOWL

Product ID: HC9020SBOWLR
Unit of Measure
1/EA
Min Order Qty
1

HC9856-3A70Y310

Product ID: HC98563A70Y310
Unit of Measure
1/EA
Min Order Qty
1

HC9858-3A50 VLV RELIEF

Product ID: HC98583A50
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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