Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Housings, Vessels, and Assemblies

BOWL 10" MEGAPLAST G2 PFA440HP product photo

BOWL 10" MEGAPLAST G2 PFA440HP

Product ID: CC36849D02
Unit of Measure
1/EA
Min Order Qty
1
CCL4001G160H13 product photo

CCL4001G160H13

Product ID: CCL4001G160H13
Unit of Measure
1/EA
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1
HOUSING PCY1RFGN16H13 product photo

Polypropylene 10", 1" NPT, DOE (RF, crush seal for cartridges without gaskets)

Product ID: PCY1RFGN16H13
Unit of Measure
1/EA
Min Order Qty
1
HOUSING PCY27GN16H product photo

Polypropylene 20", 1" NPT, Code 7

Product ID: PCY27GN16H
Unit of Measure
1/EA
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1

This product is currently not available. Please contact us for more information.

HOUSING PCY2RFGN16H13 product photo

Polypropylene 20", 1" NPT, DOE (RF, crush seal for cartridges without gaskets)

Product ID: PCY2RFGN16H13
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

HOUSING PCY2RFG16HY product photo

HOUSING PCY2RFG16HY

Product ID: PCY2RFG16HY
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1/EA
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1

This product is currently not available. Please contact us for more information.

PPS10UP-3/4-PR -911623 product photo

PPS10UP-3/4-PR -911623

Product ID: PPS10UP34PR
Unit of Measure
12/EA
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12

SUPRApak Housing Torque Unit Vented

Product ID: ACS1040AA
Unit of Measure
1/EA
Min Order Qty
1

Suprapak Housing Torque Unit Clamp Nut

Product ID: ACS1044AA
Unit of Measure
1/EA
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1

SUPRApak Housing Torque Unit Guide Bush

Product ID: ACS1043AA
Unit of Measure
1/EA
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1

Housing O-Ring Gen 2&3

Product ID: ACS1039EM
Unit of Measure
1/EA
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1

KIT ACS1050EA DN65 DIN 11851 GASKET

Product ID: ACS1050EA
Unit of Measure
1/EA
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1
729 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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