Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

30 in

Filter Media

Glass Fiber

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, GlassFiber, Length 30 Inches

Product ID: F001AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, GlassFiber, Length 30 Inches

Product ID: F005AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 316 stainless steel

Product ID: F010AW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, GlassFiber, Length 30 Inches, 304 stainless steel

Product ID: F010RW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, GlassFiber, Length 30 Inches

Product ID: F020RW30S1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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Discontinued

This part is no longer available. Please contact us for more information.
DFT Classic®, Filter Cartridges, Removal Rating 25 μm, GlassFiber, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 25 μm, GlassFiber, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: F025AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
DFT Classic®, Filter Cartridges, Removal Rating 75 μm, GlassFiber, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 75 μm, GlassFiber, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: F075AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
See All Attributes
7 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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