Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

30 in

Length

76.2 cm / 30 in

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches

Product ID: CLR1030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: CLR130
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches

Product ID: CLR2030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches

Product ID: CLR3030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches

Product ID: CLR330
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
3 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 30 inches

Product ID: CLR5030
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches

Product ID: CLR530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 30 inches

Product ID: CLR7530
Unit of Measure
12/EA
Min Order Qty
12
Length
76.2 cm / 30 in
Micron
75 micron

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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