Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Coralon

Coralon Glass Fiber 12µm Nitrile Seal 30in 76.2cm length (REPLACED BY HC2286FRS30H50YT)

Product ID: HC2286FCS30H50YT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2286
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Coralon Glass Fiber 5 micron (Beta 1000) Fluorocarbon 13in 33.02cm (REPLACED BY HC9401FHP13ZA)

Product ID: HC9401FCP13ZA
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9401
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Coralon Glass Fiber 5 micron (Beta 1000) Chloroprene 8in 20.32cm (REPLACED BY HC9600FRP8PY547)

Product ID: HC9600FCP8PY547
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Coralon Glass Fiber 5 micron (Beta 1000) Nitrile 39in 99.06cm length (REPLACED BY HC0363FRP39Z)

Product ID: HC0363FCP39H
Unit of Measure
1/EA
Min Order Qty
8
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0363
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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This product is currently not available. Please contact us for more information.

Coralon Glass Fiber 25 micron (Beta 1000) Nitrile 26in 66.04cm length (REPLACED BY HC0728FRT26H)

Product ID: HC0728FCT26H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0728
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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This product is currently not available. Please contact us for more information.

Coralon Glass Fiber 25 micron (Beta 1000) Nitrile 39in 99.06cm length (REPLACED BY HC0728FRT39H)

Product ID: HC0728FCT39H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0728
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Coralon Glass Fiber 5µm Nitrile Seal 6in 15.24cm length (REPLACED BY HC2246FRP6H50YT)

Product ID: HC2246FCP6H50YT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2246
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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