Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Cartridge Style

MCY-style junior

Emflon® PFRW Junior Style Filter Cartridge, MCY4463PFRWH4

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
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Emflon® PFRW Junior Style Filter Cartridge, MCY4440PFRWH4

Product ID: MCY4440PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2300 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
4.1 in
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Emflon® PFRW Junior Style Filter Cartridges, MCY1110PFRWH4

Product ID: MCY1110PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
500 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
1.3 in
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Fluorodyne® II Junior Filter Cartridges, MCY4440FSDWH4

Product ID: MCY4440FSDWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
0.152 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
4.17 in
Cartridge Length (Metric)
106 mm
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Emflon® PFRW Junior Style Filter Cartridge, MCY2230PFRWH4

Product ID: MCY2230PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
1400 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
3 in
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MCY4463NFWH4

Product ID: MCY4463NFWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Industry-Specific Certification
W480 Food Contact
Filter Cartridge Style
MCY-style junior
Gasket O-Ring Code
H4
Food Contact Compliant
Yes
O-Ring Seal
Silicone Elastomer
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6 Items
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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