Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

1 µm

Ultipleat® High Flow Element, HFU640CAS010JUW

Product ID: HFU640CAS010JUW
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
1016 mm (40”)
Filter Grade
1 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Pleated Polypropylene / PES Membrane
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Ultipleat® High Flow Element, HFU660CAS010JUW

Product ID: HFU660CAS010JUW
Unit of Measure
2/EA
Min Order Qty
2
Cartridge Length
1524 mm (60"""""""")
Filter Grade
1 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Pleated Polypropylene / PES Membrane
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polyester, Length 9 inches, Fluoropolymer elastomer O-ring

Product ID: HFV609PE001AH
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
09 / 228.6 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polyester, Length 9 inches

Product ID: HFV609PE001AH13
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
09 / 228.6 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 40 inches, Fluoropolymer elastomer O-ring

Product ID: HFV640PP001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 40 inches

Product ID: HFV640PP001PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector, Polyester Media Material with 1 µm (micron) Filter Grade

Product ID: HFV640PE001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polyester, Length 60 inches

Product ID: HFV660PE001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polyester
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 60 inches, Fluoropolymer elastomer O-ring

Product ID: HFV660PP001PH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 60 inches, Fluoropolymer elastomer O-ring, Acetal caps Hardware

Product ID: HFV660PP001AH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
Acetal Caps
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
See All Attributes

Vector™ High Flow Large Format Filters, Removal Rating 1 µm, Polypropylene, Length 60 inches

Product ID: HFV660PP001PJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inch/mm
Filter Grade
1 µm
Hardware Material
White polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile

Product ID: PEV12UNPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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