Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

3 µm

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 20 Inches, Ethylene Propylene O-ring Material

Product ID: HFU620UY045J
Unit of Measure
8/EA
Min Order Qty
8
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
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Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 20 Inches

Product ID: HFU620UY100J
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
20.7/526 inches/mm
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Resinbondedglassfiber, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640GF100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY045H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 4.5 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY045J
Unit of Measure
1/EA
Min Order Qty
1
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 2 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY020J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 90 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY1000J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Ethylene Propylene O-ring Material

Product ID: HFU640UY100J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 40 µm, Pleated Polypropylene Depth Structure, Length 40 Inches

Product ID: HFU640UY400J
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Pleated Polypropylene Depth Structure, Length 40 Inches, Nitrile O-ring Material

Product ID: HFU640UY100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes

Ultipleat® High Flow, Large Format Filters, Filter Grade 10 µm, Resinbondedglassfiber, Length 60 Inches, Nitrile O-ring Material

Product ID: HFU660GF100H13
Unit of Measure
4/EA
Min Order Qty
4
Filter Grade
3 µm
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
Cartridge Length (Metric)
526 mm
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Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Resinbondedglassfiber, Length 60 Inches, Fluoroelastomer O-ring Material

Product ID: HFU660GF200H
Unit of Measure
1/EA
Min Order Qty
1
Filter Grade
3 µm
Hardware Material
Glass Filled Polypropylene
Media Material
PTFE
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
Cartridge Length (Imperial)
20.7 in
See All Attributes
25 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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