Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Aluminum|Polyamide

Versalon, 150psi Simplex Hsg, 0.5in BSP Ports, 4in Length, Nitrile Seals

Product ID: HHT200C081CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.5 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.75in BSP Ports, 4in Length, Nitrile Seals

Product ID: HHT200C121CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.75in BSP Ports, 4in Length, Nitrile Seals

Product ID: HHT200C121CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 1in BSP Ports, 4in Length, Nitrile Seals

Product ID: HHT200C161CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 1in BSP Ports, 8in Length, Nitrile Seals

Product ID: HHT200C161CTSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 1in BSP Ports, 8in Length, Nitrile Seals

Product ID: HHT200C161CSSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.75in SAE Ports, 4in Length, Nitrile Seals

Product ID: HHT200A121CTRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.75 in
Number of Cartridges
1
See All Attributes

HHT200A161CSRBG Assembly Filter In-Tank

Product ID: HHT200A161CSRBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 1in SAE Ports, 8in Length, Nitrile Seals

Product ID: HHT200A161CTSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

HHT200A161CSSBG Assembly Filter In-Tank

Product ID: HHT200A161CSSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.5in SAE Ports, 8in Length, Nitrile Seals

Product ID: HHT200A081CSSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.5 in
Number of Cartridges
1
See All Attributes

Versalon, 150psi Simplex Hsg, 0.5in SAE Ports, 8in Length, Nitrile Seals

Product ID: HHT200A081CTSBG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
150 psi
Port Size
0.5 in
Number of Cartridges
1
See All Attributes

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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