Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Nominal Length (Metric)

2.54 cm

Supralon™ Lube and Hydraulic Elements, Removal Rating 5 μm, GlassFiber, Length 1 inches

Product ID: HC9020FRP1Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9020
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 7 μm, GlassFiber, Length 1 inches

Product ID: HC9020FRN1Z
Unit of Measure
10/EA
Min Order Qty
10
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9020
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 12 μm, GlassFiber, Length 1 inches

Product ID: HC9020FRS1Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9020
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 1 inches

Product ID: HC9020FRZ1Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9020
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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UE210KR01Z ELEMENT

Product ID: UE210KR01Z
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Element Series
UE210
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
1 in
Nominal Length (Metric)
2.54 cm
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UE210KX01Z ELEMENT

Product ID: UE210KX01Z
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Element Series
UE210
Family
Athalon
Filter Removal Rating (μm)
80 µm
Nominal Length (Imperial)
1 in
Nominal Length (Metric)
2.54 cm
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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